Robert J. Mitchell

Person

Winchester, MD, US

People

Patents Grantslast 30 patents

Information Patent Grant
Spinning disk with electrostatic clamped platens for ion implantation
- Patent number 12,002,649
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Robert Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for controlling electrostatic clamping of multipl...
- Patent number 11,670,532
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Scott E. Peitzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Rotary union with mechanical seal assembly
- Patent number 11,217,433
- Issue date Jan 4, 2022
- Applied Materials, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenically cooled rotatable electrostatic chuck
- Patent number 11,149,345
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Shardul Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryogenic heat transfer system
- Patent number 10,971,327
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Robert J. Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High throughput serial wafer handling end station
- Patent number 10,832,926
- Issue date Nov 10, 2020
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryogenic ferrofluid sealed rotary union
- Patent number 10,704,693
- Issue date Jul 7, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Wafer processing systems including multi-position batch load lock a...
- Patent number 10,586,720
- Issue date Mar 10, 2020
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing systems including multi-position batch load lock a...
- Patent number 10,256,125
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput substrate handling endstation and sequence
- Patent number 10,157,763
- Issue date Dec 18, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Proportional integral derivative control incorporating multiple act...
- Patent number 10,152,033
- Issue date Dec 11, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jack J. LoPiccolo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Proportional integral derivative control incorporating multiple act...
- Patent number 9,891,599
- Issue date Feb 13, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Jack J. LoPiccolo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Linkage conduit for vacuum chamber applications
- Patent number 9,484,183
- Issue date Nov 1, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-link substrate scanning device
- Patent number 9,415,508
- Issue date Aug 16, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi-position batch load lock apparatus and systems and methods in...
- Patent number 9,378,994
- Issue date Jun 28, 2016
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Floating high vacuum seal cartridge
- Patent number 8,939,451
- Issue date Jan 27, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Ion beam measurement system and method
- Patent number 8,698,108
- Issue date Apr 15, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Joseph P. Dzengeleski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated shadow mask/carrier for patterned ion implantation
- Patent number 8,216,923
- Issue date Jul 10, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Fluid delivery mechanism for vacuum wafer processing system
- Patent number 8,020,398
- Issue date Sep 20, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
High throughput wafer notch aligner
- Patent number 7,949,425
- Issue date May 24, 2011
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for measurement of beam angle in ion implantation
- Patent number 7,897,944
- Issue date Mar 1, 2011
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for producing a dislocation-free crystalline s...
- Patent number 7,816,153
- Issue date Oct 19, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Grant
Workpiece handling scan arm for ion implantation system
- Patent number 7,560,705
- Issue date Jul 14, 2009
- Axcelis Technologies, Inc.
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work-piece treatment system having load lock and buffer
- Patent number 7,010,388
- Issue date Mar 7, 2006
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable implantation angle workpiece support structure for an io...
- Patent number 6,900,444
- Issue date May 31, 2005
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Umbilical cord facilities connection for an ion beam implanter
- Patent number 6,794,664
- Issue date Sep 21, 2004
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable implantation angle workpiece support structure for an io...
- Patent number 6,740,894
- Issue date May 25, 2004
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for the backside gas cooling of a wafer in a batch ion im...
- Patent number 6,583,428
- Issue date Jun 24, 2003
- Axcelis Technologies, Inc.
- David J. Chipman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for delivering cooling gas from atmospheric press...
- Patent number 6,580,082
- Issue date Jun 17, 2003
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Spinning Disk with Electrostatic Clamped Platens for Ion Implantation
- Publication number 20230187166
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Robert Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Controlling Electrostatic Clamping of Multipl...
- Publication number 20230178405
- Publication date Jun 8, 2023
- Applied Materials, Inc.
- Scott E. Peitzsch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTARY UNION WITH MECHANICAL SEAL ASSEMBLY
- Publication number 20200111686
- Publication date Apr 9, 2020
- Applied Materials, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cryogenic Ferrofluid Sealed Rotary Union
- Publication number 20190301616
- Publication date Oct 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...
- Publication number 20190198368
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRYOGENICALLY COOLED ROTATABLE ELECTROSTATIC CHUCK
- Publication number 20190181028
- Publication date Jun 13, 2019
- SHARDUL PATEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACT...
- Publication number 20170220006
- Publication date Aug 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jack J. LoPiccolo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACT...
- Publication number 20170220007
- Publication date Aug 3, 2017
- Varian Semiconductor Equipment Associates, Inc.
- Jack J. LoPiccolo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
HIGH THROUGHPUT SERIAL WAFER HANDLING END STATION
- Publication number 20170178933
- Publication date Jun 22, 2017
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...
- Publication number 20160284578
- Publication date Sep 29, 2016
- Applied Materials, Inc.
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS
- Publication number 20160071686
- Publication date Mar 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SUBSTRATE HANDLING ENDSTATION AND SEQUENCE
- Publication number 20150063954
- Publication date Mar 5, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
MULTI-POSITION BATCH LOAD LOCK APPARATUS AND SYSTEMS AND METHODS IN...
- Publication number 20140271054
- Publication date Sep 18, 2014
- William T. Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOATING HIGH VACUUM SEAL CARTRIDGE
- Publication number 20140252720
- Publication date Sep 11, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Robert J. Mitchell
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION
- Publication number 20120244692
- Publication date Sep 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Integrated Shadow Mask/Carrier for Pattern Ion Implantation
- Publication number 20120083102
- Publication date Apr 5, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Nicholas Bateman
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK
- Publication number 20120043712
- Publication date Feb 23, 2012
- Varian Semiconductor Equipment Associates, Inc.
- William Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID DELIVERY MECHANISM FOR VACUUM WAFER PROCESSING SYSTEM
- Publication number 20100084579
- Publication date Apr 8, 2010
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION
- Publication number 20100012861
- Publication date Jan 21, 2010
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE S...
- Publication number 20090302281
- Publication date Dec 10, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- C30 - CRYSTAL GROWTH
Information Patent Application
High throughput serial wafer handling end station
- Publication number 20080138178
- Publication date Jun 12, 2008
- Axcelis Technologies,Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High throughput wafer notch aligner
- Publication number 20080138175
- Publication date Jun 12, 2008
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM
- Publication number 20080105836
- Publication date May 8, 2008
- Ari Eiriksson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Work-piece treatment system having load lock and buffer
- Publication number 20040234359
- Publication date Nov 25, 2004
- Axcelis Technologies, Inc.
- Robert J. Mitchell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable implantation angle workpiece support structure for an io...
- Publication number 20040222390
- Publication date Nov 11, 2004
- Axcelis Technologies, Inc.
- Joseph Ferrara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck wafer port and top plate with edge shielding an...
- Publication number 20040079289
- Publication date Apr 29, 2004
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS

Robert J. Mitchell

Person

Patents Grantslast 30 patents

Spinning disk with electrostatic clamped platens for ion implantation

System and method for controlling electrostatic clamping of multipl...

Rotary union with mechanical seal assembly

Cryogenically cooled rotatable electrostatic chuck

Cryogenic heat transfer system

High throughput serial wafer handling end station

Cryogenic ferrofluid sealed rotary union

Wafer processing systems including multi-position batch load lock a...

Wafer processing systems including multi-position batch load lock a...

High throughput substrate handling endstation and sequence

Proportional integral derivative control incorporating multiple act...

Proportional integral derivative control incorporating multiple act...

Linkage conduit for vacuum chamber applications

Multi-link substrate scanning device

Multi-position batch load lock apparatus and systems and methods in...

Floating high vacuum seal cartridge

Ion beam measurement system and method

Integrated shadow mask/carrier for patterned ion implantation

Fluid delivery mechanism for vacuum wafer processing system

High throughput wafer notch aligner

Method and apparatus for measurement of beam angle in ion implantation

Method and apparatus for producing a dislocation-free crystalline s...

Workpiece handling scan arm for ion implantation system

Work-piece treatment system having load lock and buffer

Adjustable implantation angle workpiece support structure for an io...

Umbilical cord facilities connection for an ion beam implanter

Adjustable implantation angle workpiece support structure for an io...

Apparatus for the backside gas cooling of a wafer in a batch ion im...

System and method for delivering cooling gas from atmospheric press...

Patents Applicationslast 30 patents

Spinning Disk with Electrostatic Clamped Platens for Ion Implantation

System and Method for Controlling Electrostatic Clamping of Multipl...

ROTARY UNION WITH MECHANICAL SEAL ASSEMBLY

Cryogenic Ferrofluid Sealed Rotary Union

WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...

CRYOGENICALLY COOLED ROTATABLE ELECTROSTATIC CHUCK

PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACT...

PROPORTIONAL INTEGRAL DERIVATIVE CONTROL INCORPORATING MULTIPLE ACT...

HIGH THROUGHPUT SERIAL WAFER HANDLING END STATION

WAFER PROCESSING SYSTEMS INCLUDING MULTI-POSITION BATCH LOAD LOCK A...

LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS

HIGH THROUGHPUT SUBSTRATE HANDLING ENDSTATION AND SEQUENCE

MULTI-POSITION BATCH LOAD LOCK APPARATUS AND SYSTEMS AND METHODS IN...

FLOATING HIGH VACUUM SEAL CARTRIDGE

INTEGRATED SHADOW MASK/CARRIER FOR PATTERN ION IMPLANTATION

Integrated Shadow Mask/Carrier for Pattern Ion Implantation

MECHANISM AND METHOD FOR ALIGNING A WORKPIECE TO A SHADOW MASK

FLUID DELIVERY MECHANISM FOR VACUUM WAFER PROCESSING SYSTEM

METHOD AND APPARATUS FOR MEASUREMENT OF BEAM ANGLE IN ION IMPLANTATION

METHOD AND APPARATUS FOR PRODUCING A DISLOCATION-FREE CRYSTALLINE S...

High throughput serial wafer handling end station

High throughput wafer notch aligner

WORKPIECE HANDLING SCAN ARM FOR ION IMPLANTATION SYSTEM

Work-piece treatment system having load lock and buffer

Adjustable implantation angle workpiece support structure for an io...

Electrostatic chuck wafer port and top plate with edge shielding an...