Robert J. Soave

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LaGrangeville, NY, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method of removing chamber residues from a plasma proces...
- Patent number 7,959,970
- Issue date Jun 14, 2011
- Tokyo Electron Limited
- Marcel Gaudet
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for using ion implantation to treat the sidewalls of a featu...
- Patent number 7,183,183
- Issue date Feb 27, 2007
- Tokyo Electron Limited
- Kenneth Duerksen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System and method of removing chamber residues from a plasma proces...
- Publication number 20050224458
- Publication date Oct 13, 2005
- TOKYO ELECTRON LIMITED
- Marcel Gaudet
- B08 - CLEANING
Information Patent Application
Method for using ion implantation to treat the sidewalls of a featu...
- Publication number 20050087516
- Publication date Apr 28, 2005
- TOKYO ELECTRON LIMITED
- Kenneth Duerksen
- H01 - BASIC ELECTRIC ELEMENTS