Robert J. Steger

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for controlling spatial temperature distribution
- Patent number 9,824,904
- Issue date Nov 21, 2017
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for controlling spatial temperature distribution across a se...
- Patent number 8,963,052
- Issue date Feb 24, 2015
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling the spatial temperature distri...
- Patent number 8,921,740
- Issue date Dec 30, 2014
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support having dynamic temperature control
- Patent number 8,747,559
- Issue date Jun 10, 2014
- Lam Research Corporation
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling the spatial temperature distri...
- Patent number 8,536,494
- Issue date Sep 17, 2013
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support having dynamic temperature control
- Patent number 7,993,460
- Issue date Aug 9, 2011
- Lam Research Corporation
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck support assembly
- Patent number 7,939,784
- Issue date May 10, 2011
- Lam Research Corporation
- Robert Steger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of determining a target mesa configuration of an electrostat...
- Patent number 7,869,184
- Issue date Jan 11, 2011
- Lam Research Corporation
- Robert Steger
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck having radial temperature control capability
- Patent number 7,718,932
- Issue date May 18, 2010
- Lam Research Corporation
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning of electrostatic chucks using ultrasonic agitation and app...
- Patent number 7,648,582
- Issue date Jan 19, 2010
- Lam Research Corporation
- Robert J. Steger
- B08 - CLEANING
Information Patent Grant
Method of tuning thermal conductivity of electrostatic chuck suppor...
- Patent number 7,501,605
- Issue date Mar 10, 2009
- Lam Research Corporation
- Robert Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of making gas distribution members for plasma processing ap...
- Patent number 7,480,974
- Issue date Jan 27, 2009
- Lam Research Corporation
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switched uniformity control
- Patent number 7,282,454
- Issue date Oct 16, 2007
- Lam Research Corporation
- Richard A. Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling the spatial temperature distri...
- Patent number 7,274,004
- Issue date Sep 25, 2007
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart component-based management techniques in a substrate processi...
- Patent number 7,254,510
- Issue date Aug 7, 2007
- Lam Research Corporation
- Neil Benjamin
- G01 - MEASURING TESTING
Information Patent Grant
Faraday shield disposed within an inductively coupled plasma etchin...
- Patent number 7,223,321
- Issue date May 29, 2007
- Lam Research Corporation
- Keith Comendant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for the compensation of edge ring wear in a pl...
- Patent number 7,176,403
- Issue date Feb 13, 2007
- Lam Research Corporation
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having radial temperature control capability
- Patent number 7,161,121
- Issue date Jan 9, 2007
- Lam Research Corporation
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Smart component-based management techniques in a substrate processi...
- Patent number 7,152,011
- Issue date Dec 19, 2006
- Lam Research Corporation
- Neil Benjamin
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for in situ substrate temperature monitoring
- Patent number 6,976,782
- Issue date Dec 20, 2005
- Lam Research Corporation
- Robert J. Steger
- G01 - MEASURING TESTING
Information Patent Grant
System and method for integrated multi-use optical alignment
- Patent number 6,952,255
- Issue date Oct 4, 2005
- Lam Research Corporation
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for the compensation of edge ring wear in a pl...
- Patent number 6,896,765
- Issue date May 24, 2005
- Lam Research Corporation
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for controlling the spatial temperature distri...
- Patent number 6,847,014
- Issue date Jan 25, 2005
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low contamination plasma chamber components and methods for making...
- Patent number 6,805,952
- Issue date Oct 19, 2004
- Lam Research Corporation
- Christopher C. Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Critical dimension variation compensation across a wafer by means o...
- Patent number 6,770,852
- Issue date Aug 3, 2004
- Lam Research Corporation
- Robert J. Steger
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Switched uniformity control
- Patent number 6,632,322
- Issue date Oct 14, 2003
- Lam Research Corporation
- Richard A. Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Corrosion resistant component of semiconductor processing equipment...
- Patent number 6,444,083
- Issue date Sep 3, 2002
- Lam Research Corporation
- Robert Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM TOOLS FOR MONITORING, ASSESSING AND RES...
- Publication number 20230400508
- Publication date Dec 14, 2023
- LAM RESEARCH CORPORATION
- Bridget Hill FREESE
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING SPATIAL TEMPERATURE DISTRIBUTION
- Publication number 20150187619
- Publication date Jul 2, 2015
- LAM RESEARCH CORPORATION
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CONTROLLING THE SPATIAL TEMPERATURE DISTRI...
- Publication number 20140034608
- Publication date Feb 6, 2014
- LAM RESEARCH CORPORATION
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT HAVING DYNAMIC TEMPERATURE CONTROL
- Publication number 20110262315
- Publication date Oct 27, 2011
- LAM RESEARCH CORPORATION
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DETERMINING A TARGET MESA CONFIGURATION OF AN ELECTROSTAT...
- Publication number 20110063772
- Publication date Mar 17, 2011
- LAM RESEARCH CORPORATION
- Robert Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of determining a target mesa configuration of an electrostat...
- Publication number 20100159712
- Publication date Jun 24, 2010
- Lam Research Corporation
- Robert Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CONTROLLING SPATIAL TEMPERATURE DISTRIBUTION ACROSS A SE...
- Publication number 20090215201
- Publication date Aug 27, 2009
- Lam Research Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK SUPPORT ASSEMBLY
- Publication number 20090161286
- Publication date Jun 25, 2009
- LAM RESEARCH CORPORATION
- Robert Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF MAKING GAS DISTRIBUTION MEMBERS FOR PLASMA PROCESSING AP...
- Publication number 20090120583
- Publication date May 14, 2009
- LAM RESEARCH CORPORATION
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of tuning thermal conductivity of electrostatic chuck suppor...
- Publication number 20080083736
- Publication date Apr 10, 2008
- LAM RESEARCH CORPORATION
- Robert Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Faraday Shield Disposed Within An Inductively Coupled Plasma Etchin...
- Publication number 20070181257
- Publication date Aug 9, 2007
- LAM RESEARCH CORPORATION
- Keith Comendant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning of electrostatic chucks using ultrasonic agitation and app...
- Publication number 20070144554
- Publication date Jun 28, 2007
- LAM RESEARCH CORPORATION
- Robert J. Steger
- B08 - CLEANING
Information Patent Application
ELECTROSTATIC CHUCK HAVING RADIAL TEMPERATURE CONTROL CAPABILITY
- Publication number 20070086144
- Publication date Apr 19, 2007
- LAM RESEARCH CORPORATION
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HAVING RADIAL TEMPERATURE CONTROL CAPABILITY
- Publication number 20070007276
- Publication date Jan 11, 2007
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Smart component-based management techniques in a substrate processi...
- Publication number 20060271325
- Publication date Nov 30, 2006
- Lam Research Corporation
- Neil Benjamin
- G05 - CONTROLLING REGULATING
Information Patent Application
Methods of making gas distribution members for plasma processing ap...
- Publication number 20060180275
- Publication date Aug 17, 2006
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Smart component-based management techniques in a substrate processi...
- Publication number 20060047458
- Publication date Mar 2, 2006
- Neil Benjamin
- G05 - CONTROLLING REGULATING
Information Patent Application
Method and apparatus for controlling spatial temperature distribution
- Publication number 20050211385
- Publication date Sep 29, 2005
- Lam Research Corporation, a Delaware Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for controlling the spatial temperature distri...
- Publication number 20050173404
- Publication date Aug 11, 2005
- Lam Research Corporation, a Delaware Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for controlling the spatial temperature distri...
- Publication number 20050173403
- Publication date Aug 11, 2005
- Lam Research Corporation, a Delaware Corporation
- Neil Benjamin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for the compensation of edge ring wear in a pl...
- Publication number 20050056622
- Publication date Mar 17, 2005
- Lam Research Corporation
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for integrated multi-use optical alignment
- Publication number 20050030524
- Publication date Feb 10, 2005
- Lam Research Corp.
- Andrew Perry
- G01 - MEASURING TESTING
Information Patent Application
Method for balancing return currents in plasma processing apparatus
- Publication number 20050022736
- Publication date Feb 3, 2005
- Lam Research Inc., a Delaware Corporation
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate support having dynamic temperature control
- Publication number 20040261721
- Publication date Dec 30, 2004
- Robert J. Steger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Low contamination plasma chamber components and methods for making...
- Publication number 20040224128
- Publication date Nov 11, 2004
- Lam Research Corporation
- Christopher C. Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for the compensation of edge ring wear in a pl...
- Publication number 20040053428
- Publication date Mar 18, 2004
- Robert J. Steger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Switched uniformity control
- Publication number 20040031564
- Publication date Feb 19, 2004
- Lam Research Corporation
- Richard A. Gottscho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Low contamination plasma chamber components and methods for making...
- Publication number 20020086118
- Publication date Jul 4, 2002
- Christopher C. Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert J. Steger

Person

Patents Grantslast 30 patents

Method and apparatus for controlling spatial temperature distribution

Method for controlling spatial temperature distribution across a se...

Method and apparatus for controlling the spatial temperature distri...

Substrate support having dynamic temperature control

Method and apparatus for controlling the spatial temperature distri...

Substrate support having dynamic temperature control

Electrostatic chuck support assembly

Method of determining a target mesa configuration of an electrostat...

Electrostatic chuck having radial temperature control capability

Cleaning of electrostatic chucks using ultrasonic agitation and app...

Method of tuning thermal conductivity of electrostatic chuck suppor...

Methods of making gas distribution members for plasma processing ap...

Switched uniformity control

Method and apparatus for controlling the spatial temperature distri...

Smart component-based management techniques in a substrate processi...

Faraday shield disposed within an inductively coupled plasma etchin...

Method and apparatus for the compensation of edge ring wear in a pl...

Electrostatic chuck having radial temperature control capability

Smart component-based management techniques in a substrate processi...

Methods and apparatus for in situ substrate temperature monitoring

System and method for integrated multi-use optical alignment

Method and apparatus for the compensation of edge ring wear in a pl...

Method and apparatus for controlling the spatial temperature distri...

Low contamination plasma chamber components and methods for making...

Critical dimension variation compensation across a wafer by means o...

Switched uniformity control

Corrosion resistant component of semiconductor processing equipment...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM TOOLS FOR MONITORING, ASSESSING AND RES...

METHOD AND APPARATUS FOR CONTROLLING SPATIAL TEMPERATURE DISTRIBUTION

METHOD AND APPARATUS FOR CONTROLLING THE SPATIAL TEMPERATURE DISTRI...

SUBSTRATE SUPPORT HAVING DYNAMIC TEMPERATURE CONTROL

METHOD OF DETERMINING A TARGET MESA CONFIGURATION OF AN ELECTROSTAT...

Method of determining a target mesa configuration of an electrostat...

METHOD FOR CONTROLLING SPATIAL TEMPERATURE DISTRIBUTION ACROSS A SE...

ELECTROSTATIC CHUCK SUPPORT ASSEMBLY

METHODS OF MAKING GAS DISTRIBUTION MEMBERS FOR PLASMA PROCESSING AP...

Method of tuning thermal conductivity of electrostatic chuck suppor...

Faraday Shield Disposed Within An Inductively Coupled Plasma Etchin...

Cleaning of electrostatic chucks using ultrasonic agitation and app...

ELECTROSTATIC CHUCK HAVING RADIAL TEMPERATURE CONTROL CAPABILITY

ELECTROSTATIC CHUCK HAVING RADIAL TEMPERATURE CONTROL CAPABILITY

Smart component-based management techniques in a substrate processi...

Methods of making gas distribution members for plasma processing ap...

Smart component-based management techniques in a substrate processi...

Method and apparatus for controlling spatial temperature distribution

Method and apparatus for controlling the spatial temperature distri...

Method and apparatus for controlling the spatial temperature distri...

Method and apparatus for the compensation of edge ring wear in a pl...

System and method for integrated multi-use optical alignment

Method for balancing return currents in plasma processing apparatus

Substrate support having dynamic temperature control

Low contamination plasma chamber components and methods for making...

Method and apparatus for the compensation of edge ring wear in a pl...

Switched uniformity control

Low contamination plasma chamber components and methods for making...