Robert J. Stoya

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Cave Creek, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for chemical mechanical planarization and for detecting end...
- Patent number 7,622,052
- Issue date Nov 24, 2009
- Novellus Systems, Inc.
- Justin Quarantello
- B24 - GRINDING POLISHING
Information Patent Grant
Method of calibration and data evaluation for eddy current metrolog...
- Patent number 7,198,545
- Issue date Apr 3, 2007
- Novellus Systems, Inc.
- Robert J. Stoya
- B24 - GRINDING POLISHING
Information Patent Grant
Methods using eddy current for calibrating a CMP tool
- Patent number 7,189,140
- Issue date Mar 13, 2007
- Novellus Systems, Inc.
- John Shugrue
- B24 - GRINDING POLISHING
Information Patent Grant
Methods and apparatuses for conditioning polishing surfaces utilize...
- Patent number 6,953,382
- Issue date Oct 11, 2005
- Novellus Systems, Inc.
- Nikolay Korovin
- B24 - GRINDING POLISHING