Robert K. Becker

Person

Danvers, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for beam deflection in a gas cluster ion beam...
- Patent number 9,540,725
- Issue date Jan 10, 2017
- TEL Epion Inc.
- Kenneth Regan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
GCIB nozzle assembly
- Patent number 9,343,259
- Issue date May 17, 2016
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pre-aligned nozzle/skimmer
- Patent number 9,305,746
- Issue date Apr 5, 2016
- TEL Epion Inc.
- Robert K. Becker
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Low contamination scanner for GCIB system
- Patent number 9,029,808
- Issue date May 12, 2015
- TEL Epion Inc.
- Matthew C. Gwinn
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Multiple nozzle gas cluster ion beam system
- Patent number 8,981,322
- Issue date Mar 17, 2015
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam system with rapid gas switching apparatus
- Patent number 8,338,806
- Issue date Dec 25, 2012
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of irradiating substrate with gas cluster ion beam formed fr...
- Patent number 8,304,033
- Issue date Nov 6, 2012
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple nozzle gas cluster ion beam processing system and method o...
- Patent number 8,097,860
- Issue date Jan 17, 2012
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for improved beam stability in high current ga...
- Patent number 7,060,988
- Issue date Jun 13, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for improving the effectiveness of medical stents...
- Patent number 6,676,989
- Issue date Jan 13, 2004
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for capturing and removing contaminant particles from an int...
- Patent number 5,670,217
- Issue date Sep 23, 1997
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for capturing and removing contaminant particles from an...
- Patent number 5,656,092
- Issue date Aug 12, 1997
- Eaton Corporation
- Julian G. Blake
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
GCIB NOZZLE ASSEMBLY
- Publication number 20160042909
- Publication date Feb 11, 2016
- TEL Epion Inc.
- Matthew C. Gwinn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...
- Publication number 20150332924
- Publication date Nov 19, 2015
- TEL Epion Inc.
- Kenneth Regan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-ALIGNED NOZZLE/SKIMMER
- Publication number 20140123457
- Publication date May 8, 2014
- TEL Epion Inc.
- Robert K. Becker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE
- Publication number 20130082189
- Publication date Apr 4, 2013
- TEL Epion Inc.
- Robert K. Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CLUSTER ION BEAM SYSTEM WITH RAPID GAS SWITCHING APPARATUS
- Publication number 20110272594
- Publication date Nov 10, 2011
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM
- Publication number 20110240602
- Publication date Oct 6, 2011
- TEL Epion Inc.
- Robert K. Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRE-ALIGNED NOZZLE/SKIMMER
- Publication number 20100243913
- Publication date Sep 30, 2010
- TEL Epion Inc.
- Robert K. Becker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
METHOD OF FORMING TRENCH ISOLATION USING A MULTIPLE NOZZLE GAS CLUS...
- Publication number 20100193708
- Publication date Aug 5, 2010
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE NOZZLE GAS CLUSTER ION BEAM PROCESSING SYSTEM AND METHOD O...
- Publication number 20100193472
- Publication date Aug 5, 2010
- TEL Epion Inc.
- Martin D. Tabat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE NOZZLE GAS CLUSTER ION BEAM SYSTEM
- Publication number 20100193701
- Publication date Aug 5, 2010
- TEL Epion Inc.
- Martin D. Tabat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for improved beam stability in high current ga...
- Publication number 20050205801
- Publication date Sep 22, 2005
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for improving the effectiveness of medical stents...
- Publication number 20020051846
- Publication date May 2, 2002
- Epion Corporation
- Allen R. Kirkpatrick
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert K. Becker

Person

Patents Grantslast 30 patents

Method and apparatus for beam deflection in a gas cluster ion beam...

GCIB nozzle assembly

Pre-aligned nozzle/skimmer

Low contamination scanner for GCIB system

Multiple nozzle gas cluster ion beam system

Gas cluster ion beam system with rapid gas switching apparatus

Method of irradiating substrate with gas cluster ion beam formed fr...

Multiple nozzle gas cluster ion beam processing system and method o...

Method and apparatus for improved beam stability in high current ga...

Method and system for improving the effectiveness of medical stents...

Method for capturing and removing contaminant particles from an int...

Apparatus for capturing and removing contaminant particles from an...

Patents Applicationslast 30 patents

GCIB NOZZLE ASSEMBLY

METHOD AND APPARATUS FOR BEAM DEFLECTION IN A GAS CLUSTER ION BEAM...

PRE-ALIGNED NOZZLE/SKIMMER

PRE-ALIGNED MULTI-BEAM NOZZLE/SKIMMER MODULE

GAS CLUSTER ION BEAM SYSTEM WITH RAPID GAS SWITCHING APPARATUS

HIGH-VOLTAGE GAS CLUSTER ION BEAM (GCIB) PROCESSING SYSTEM

PRE-ALIGNED NOZZLE/SKIMMER

METHOD OF FORMING TRENCH ISOLATION USING A MULTIPLE NOZZLE GAS CLUS...

MULTIPLE NOZZLE GAS CLUSTER ION BEAM PROCESSING SYSTEM AND METHOD O...

MULTIPLE NOZZLE GAS CLUSTER ION BEAM SYSTEM

Method and apparatus for improved beam stability in high current ga...

Method and system for improving the effectiveness of medical stents...