Robert K. Berglund

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Mesa, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Controlled isotropy reactive ion etcher for multi-stepped sloped co...
- Patent number 5,250,165
- Issue date Oct 5, 1993
- Motorola, Inc.
- Robert Berglund
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sloped contact etch process
- Patent number 4,902,377
- Issue date Feb 20, 1990
- Motorola, Inc.
- Robert K. Berglund
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sloped contact etch process
- Patent number 4,698,128
- Issue date Oct 6, 1987
- Motorola, Inc.
- Robert K. Berglund
- H01 - BASIC ELECTRIC ELEMENTS