TREA

Robert Kane

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  • Wakefield, MA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma enhanced ALD system
    • Patent number 10,351,950
    • Issue date Jul 16, 2019
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma Enhanced ALD System
    • Publication number 20190284689
    • Publication date Sep 19, 2019
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA ENHANCED ALD SYSTEM
    • Publication number 20160281223
    • Publication date Sep 29, 2016
    • Ultratech, Inc.
    • Mark Sowa
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...