Membership
Tour
Register
Log in
Robert KIM
Follow
Person
San Francisco, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
Patent number
11,136,665
Issue date
Oct 5, 2021
Applied Materials, Inc.
Dale Du Bois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shadow ring for modifying wafer edge and bevel deposition
Patent number
10,227,695
Issue date
Mar 12, 2019
Applied Materials, Inc.
Dale R. Du Bois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer rotation in a semiconductor chamber
Patent number
9,922,819
Issue date
Mar 20, 2018
Applied Materials, Inc.
Ganesh Balasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Wafer rotation in a semiconductor chamber
Patent number
9,593,419
Issue date
Mar 14, 2017
Applied Materials, Inc.
Ganesh Balasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION
Publication number
20190153592
Publication date
May 23, 2019
Applied Materials, Inc.
Dale Du BOIS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER ROTATION IN A SEMICONDUCTOR CHAMBER
Publication number
20170162385
Publication date
Jun 8, 2017
Applied Materials, Inc.
Ganesh BALASUBRAMANIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER ROTATION IN A SEMICONDUCTOR CHAMBER
Publication number
20150262859
Publication date
Sep 17, 2015
Applied Materials, Inc.
Ganesh BALASUBRAMANIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SHADOW RING FOR MODIFYING WAFER EDGE AND BEVEL DEPOSITION
Publication number
20110159211
Publication date
Jun 30, 2011
Applied Materials, Inc.
Dale R. Du Bois
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...