Robert Knop

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate gripper with integrated electrical contacts
- Patent number 7,780,825
- Issue date Aug 24, 2010
- Lam Research Corporation
- Aleksander Owczarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System, method and apparatus for constant voltage control of RF gen...
- Patent number 7,053,000
- Issue date May 30, 2006
- Lam Research Corporation
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Phase control of megasonic RF generator for optimum operation
- Patent number 7,033,845
- Issue date Apr 25, 2006
- Lam Research Corporation
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Gas distribution apparatus for semiconductor processing
- Patent number 6,508,913
- Issue date Jan 21, 2003
- Lam Research Corporation
- Brian K. McMillin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for compensating wafer bias in a plasma processin...
- Patent number 6,361,645
- Issue date Mar 26, 2002
- Lam Research Corporation
- Alan M. Schoepp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas distribution apparatus for semiconductor processing
- Patent number 6,333,272
- Issue date Dec 25, 2001
- Lam Research Corporation
- Brian K. McMillin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE GRIPPER WITH INTEGRATED ELECTRICAL CONTACTS
- Publication number 20080289967
- Publication date Nov 27, 2008
- LAM RESEARCH CORPORATION
- Aleksander Owczarz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System, method and apparatus for constant voltage control of RF gen...
- Publication number 20040174155
- Publication date Sep 9, 2004
- LAM RESEARCH CORPORATION
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Phase control of megasonic RF generator for optimum operation
- Publication number 20040157349
- Publication date Aug 12, 2004
- LAM RESEARCH CORPORATION
- Thomas W. Anderson
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
Gas distribution apparatus for semiconductor processing
- Publication number 20020042205
- Publication date Apr 11, 2002
- Brian K. McMillin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert Knop

Person

Patents Grantslast 30 patents

Substrate gripper with integrated electrical contacts

System, method and apparatus for constant voltage control of RF gen...

Phase control of megasonic RF generator for optimum operation

Gas distribution apparatus for semiconductor processing

Method and device for compensating wafer bias in a plasma processin...

Gas distribution apparatus for semiconductor processing

Patents Applicationslast 30 patents

SUBSTRATE GRIPPER WITH INTEGRATED ELECTRICAL CONTACTS

System, method and apparatus for constant voltage control of RF gen...

Phase control of megasonic RF generator for optimum operation

Gas distribution apparatus for semiconductor processing