Robert L. Anderson III

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Scottsdale, AZ, US

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Patents Grantslast 30 patents

Information Patent Grant
Polishing apparatus with improved alignment of polishing plates
- Patent number 6,113,478
- Issue date Sep 5, 2000
- SpeedFam-IPEC Corporation
- Robert L. Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 6,001,005
- Issue date Dec 14, 1999
- Speedfam Corporation
- Robert L. Anderson
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus with support columns supporting multiple platfo...
- Patent number 5,957,763
- Issue date Sep 28, 1999
- Speedfam Corporation
- Robert L. Anderson
- B24 - GRINDING POLISHING