Robert L. Gerlach

Person

Portland, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-chamber electron detector
- Patent number 8,164,059
- Issue date Apr 24, 2012
- FEI Company
- Robert Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle detector suitable for detecting ions and electrons
- Patent number 7,009,187
- Issue date Mar 7, 2006
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Angular aperture shaped beam system and method
- Patent number 6,977,386
- Issue date Dec 20, 2005
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shaped and low density focused ion beams
- Patent number 6,949,756
- Issue date Sep 27, 2005
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collection of secondary electrons through the objective lens of a s...
- Patent number 6,946,654
- Issue date Sep 20, 2005
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam system with coaxial scanning electron microscope
- Patent number 6,900,447
- Issue date May 31, 2005
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-column FIB for nanofabrication applications
- Patent number 6,797,969
- Issue date Sep 28, 2004
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam system using multiple electron beams
- Patent number 6,797,953
- Issue date Sep 28, 2004
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam system
- Patent number 6,710,338
- Issue date Mar 23, 2004
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Through-the-lens neutralization for charged particle beam system
- Patent number 6,683,320
- Issue date Jan 27, 2004
- FEI Company
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for enhancing yield of secondary ions
- Patent number 6,414,307
- Issue date Jul 2, 2002
- FEI Company
- Robert L. Gerlach
- G01 - MEASURING TESTING
Information Patent Grant
Precision electrostatic lens system and method of manufacture
- Patent number 5,241,182
- Issue date Aug 31, 1993
- FEI Company
- Noel A. Martin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN-CHAMBER ELECTRON DETECTOR
- Publication number 20120199738
- Publication date Aug 9, 2012
- FEI Company
- ROBERT GERLACH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-CHAMBER ELECTRON DETECTOR
- Publication number 20080308742
- Publication date Dec 18, 2008
- FEI Company
- Robert Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle detector suitable for detecting ions and electrons
- Publication number 20040262531
- Publication date Dec 30, 2004
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Angular aperture shaped beam system and method
- Publication number 20040140438
- Publication date Jul 22, 2004
- Robert L. Gerlach
- B82 - NANO-TECHNOLOGY
Information Patent Application
Focused ion beam system with coaxial scanning electron microscope
- Publication number 20040108458
- Publication date Jun 10, 2004
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Through-the-lens neutralization for charged particle beam system
- Publication number 20020134949
- Publication date Sep 26, 2002
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam system using multiple electron beams
- Publication number 20020117967
- Publication date Aug 29, 2002
- Robert L. Gerlach
- B82 - NANO-TECHNOLOGY
Information Patent Application
Focused ion beam system
- Publication number 20020084426
- Publication date Jul 4, 2002
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Collection of secondary electrons through the objective lens of a s...
- Publication number 20020024013
- Publication date Feb 28, 2002
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shaped and low density focused ion beams
- Publication number 20010045525
- Publication date Nov 29, 2001
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Through-the-lens-collection of secondary particles for a focused io...
- Publication number 20010032938
- Publication date Oct 25, 2001
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Multi-column FIB for nanofabrication applications
- Publication number 20010032939
- Publication date Oct 25, 2001
- Robert L. Gerlach
- H01 - BASIC ELECTRIC ELEMENTS

Robert L. Gerlach

Person

Patents Grantslast 30 patents

In-chamber electron detector

Particle detector suitable for detecting ions and electrons

Angular aperture shaped beam system and method

Shaped and low density focused ion beams

Collection of secondary electrons through the objective lens of a s...

Focused ion beam system with coaxial scanning electron microscope

Multi-column FIB for nanofabrication applications

Electron beam system using multiple electron beams

Focused ion beam system

Through-the-lens neutralization for charged particle beam system

Method and apparatus for enhancing yield of secondary ions

Precision electrostatic lens system and method of manufacture

Patents Applicationslast 30 patents

IN-CHAMBER ELECTRON DETECTOR

IN-CHAMBER ELECTRON DETECTOR

Particle detector suitable for detecting ions and electrons

Angular aperture shaped beam system and method

Focused ion beam system with coaxial scanning electron microscope

Through-the-lens neutralization for charged particle beam system

Electron beam system using multiple electron beams

Focused ion beam system

Collection of secondary electrons through the objective lens of a s...

Shaped and low density focused ion beams

Through-the-lens-collection of secondary particles for a focused io...

Multi-column FIB for nanofabrication applications