Robert L. Moffett

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Beverly, MA, US

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Patents Applicationslast 30 patents

Information Patent Application
Inline Capacitive Ignition of Inductively Coupled Plasma Ion Source
- Publication number 20130305988
- Publication date Nov 21, 2013
- Axcelis Technologies, Inc.
- William F. DiVergilio
- H01 - BASIC ELECTRIC ELEMENTS