Robert Lawrence Healton

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Kokomo, IN, US

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for electrically testing and characterizing fo...
- Patent number 6,750,152
- Issue date Jun 15, 2004
- Delphi Technologies, Inc.
- John Carl Christenson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS sensor structure and microfabrication process therefor
- Patent number 6,428,713
- Issue date Aug 6, 2002
- Delphi Technologies, Inc.
- John Carl Christenson
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromachined integrated pressure sensor with oxide polysilicon cav...
- Patent number 5,531,121
- Issue date Jul 2, 1996
- Delco Electronics Corporation
- Douglas R. Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of micromachining an integrated sensor on the surface of a s...
- Patent number 5,427,975
- Issue date Jun 27, 1995
- Delco Electronics Corporation
- Douglas R. Sparks
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
MEMS sensor structure and microfabrication process therefor
- Publication number 20020125208
- Publication date Sep 12, 2002
- DELPHI TECHNOLOGIES, INC.
- John Carl Christenson
- B81 - MICRO-STRUCTURAL TECHNOLOGY