Robert M. Danen

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Inspection with previous step subtraction
- Patent number 11,921,052
- Issue date Mar 5, 2024
- KLA Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Defect discovery and recipe optimization for inspection of three-di...
- Patent number 11,047,806
- Issue date Jun 29, 2021
- KLA-Tencor Corporation
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Phase filter for enhanced defect detection in multilayer structure
- Patent number 10,957,568
- Issue date Mar 23, 2021
- KLA-Tencor Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Three-dimensional calibration structures and methods for measuring...
- Patent number 10,928,740
- Issue date Feb 23, 2021
- KLA Corporation
- Philip Measor
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional imaging for semiconductor wafer inspection
- Patent number 10,887,580
- Issue date Jan 5, 2021
- KLA-Tencor Corporation
- Pavel Kolchin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Aided image reconstruction
- Patent number 10,621,718
- Issue date Apr 14, 2020
- KLA-Tencor Corp.
- Soren Konecky
- G01 - MEASURING TESTING
Information Patent Grant
Phase filter for enhanced defect detection in multilayer structure
- Patent number 10,615,067
- Issue date Apr 7, 2020
- KLA-Tencor Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining information for defects on wafers
- Patent number 10,571,407
- Issue date Feb 25, 2020
- KLA-Tencor Corp.
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for selecting recipe for defect inspection
- Patent number 10,338,002
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Determining information for defects on wafers
- Patent number 10,317,347
- Issue date Jun 11, 2019
- KLA-Tencor Corp.
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Grant
Reverse decoration for defect detection amplification
- Patent number 10,249,546
- Issue date Apr 2, 2019
- KLA-Tencor Corporation
- Philip Measor
- G01 - MEASURING TESTING
Information Patent Grant
Determining a configuration for an optical element positioned in a...
- Patent number 10,215,713
- Issue date Feb 26, 2019
- KLA-Tencor Corp.
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 10,132,760
- Issue date Nov 20, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method to determine depth for optical wafer inspection
- Patent number 9,989,479
- Issue date Jun 5, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- G02 - OPTICS
Information Patent Grant
Apparatus and methods for finding a best aperture and mode to enhan...
- Patent number 9,726,617
- Issue date Aug 8, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Determining a configuration for an optical element positioned in a...
- Patent number 9,709,510
- Issue date Jul 18, 2017
- KLA-Tencor Corp.
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and methods for determining defect depths in vertical sta...
- Patent number 9,696,264
- Issue date Jul 4, 2017
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
System and method for apodization in a semiconductor device inspect...
- Patent number 9,645,093
- Issue date May 9, 2017
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS
Information Patent Grant
Wafer and reticle inspection systems and methods for selecting illu...
- Patent number 9,523,646
- Issue date Dec 20, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and method to determine depth for optical wafer inspection
- Patent number 9,389,349
- Issue date Jul 12, 2016
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Grant
Wafer and reticle inspection systems and methods for selecting illu...
- Patent number 9,347,891
- Issue date May 24, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and method for apodization in a semiconductor device inspect...
- Patent number 9,176,069
- Issue date Nov 3, 2015
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G01 - MEASURING TESTING
Information Patent Grant
Optical defect amplification for improved sensitivity on patterned...
- Patent number 8,705,027
- Issue date Apr 22, 2014
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for blocking specular reflection and suppressin...
- Patent number 7,940,384
- Issue date May 10, 2011
- KLA-Tencor Corp.
- Andrew V. Hill
- G01 - MEASURING TESTING
Information Patent Grant
Polarized broadband wafer inspection
- Patent number 7,710,564
- Issue date May 4, 2010
- KLA-Tencor Corporation
- Peter Hill
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SHOT NOISE REDUCTION USING FRAME AVERAGING
- Publication number 20230351553
- Publication date Nov 2, 2023
- KLA Corporation
- Abdurrahman Sezginer
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
INSPECTION WITH PREVIOUS STEP SUBTRACTION
- Publication number 20230316478
- Publication date Oct 5, 2023
- KLA Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PHASE FILTER FOR ENHANCED DEFECT DETECTION IN MULTILAYER STRUCTURE
- Publication number 20190355601
- Publication date Nov 21, 2019
- KLA-Tencor Corporation
- Robert M. Danen
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DESIGN AIDED IMAGE RECONSTRUCTION
- Publication number 20190295237
- Publication date Sep 26, 2019
- KLA-Tencor Corporation
- Soren Konecky
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Determining Information for Defects on Wafers
- Publication number 20190257768
- Publication date Aug 22, 2019
- KLA-Tencor Corporation
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Application
Three-Dimensional Calibration Structures and Methods for Measuring...
- Publication number 20180224749
- Publication date Aug 9, 2018
- KLA-Tencor Corporation
- Philip Measor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Defect Discovery And Recipe Optimization For Inspection Of Three-Di...
- Publication number 20180149603
- Publication date May 31, 2018
- KLA-Tencor Corporation
- Santosh Bhattacharyya
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Three-Dimensional Imaging For Semiconductor Wafer Inspection
- Publication number 20180103247
- Publication date Apr 12, 2018
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Reverse Decoration for Defect Detection Amplification
- Publication number 20180025952
- Publication date Jan 25, 2018
- KLA-Tencor Corporation
- Philip Measor
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20170307545
- Publication date Oct 26, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Determining a Configuration for an Optical Element Positioned in a...
- Publication number 20170292918
- Publication date Oct 12, 2017
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...
- Publication number 20160266047
- Publication date Sep 15, 2016
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
- Publication number 20160054232
- Publication date Feb 25, 2016
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G01 - MEASURING TESTING
Information Patent Application
Determining a Configuration for an Optical Element Positioned in a...
- Publication number 20150377797
- Publication date Dec 31, 2015
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
Determining Information for Defects on Wafers
- Publication number 20150123014
- Publication date May 7, 2015
- KLA-Tencor Corporation
- Stefano Palomba
- G01 - MEASURING TESTING
Information Patent Application
WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...
- Publication number 20150015874
- Publication date Jan 15, 2015
- KLA-Tencor Corporation
- Grace H. Chen
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...
- Publication number 20140354983
- Publication date Dec 4, 2014
- KLA-Tencor Corporation
- Pavel Kolchin
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHODS FOR DETERMINING DEFECT DEPTHS IN VERTICAL STA...
- Publication number 20140300890
- Publication date Oct 9, 2014
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD TO DETERMINE DEPTH FOR OPTICAL WAFER INSPECTION
- Publication number 20140268117
- Publication date Sep 18, 2014
- Pavel Kolchin
- G02 - OPTICS
Information Patent Application
System and Method for Apodization in a Semiconductor Device Inspect...
- Publication number 20140016125
- Publication date Jan 16, 2014
- KLA-Tencor Corporation
- Jamie M. Sullivan
- G02 - OPTICS
Information Patent Application
OPTICAL DEFECT AMPLIFICATION FOR IMPROVED SENSITIVITY ON PATTERNED...
- Publication number 20120113416
- Publication date May 10, 2012
- KLA-Tencor Corporation
- Steven R. Lange
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR BLOCKING SPECULAR REFLECTION AND SUPPRESSIN...
- Publication number 20080144034
- Publication date Jun 19, 2008
- Andrew V. Hill
- G02 - OPTICS

Robert M. Danen

Person

Patents Grantslast 30 patents

Inspection with previous step subtraction

Defect discovery and recipe optimization for inspection of three-di...

Phase filter for enhanced defect detection in multilayer structure

Three-dimensional calibration structures and methods for measuring...

Three-dimensional imaging for semiconductor wafer inspection

Aided image reconstruction

Phase filter for enhanced defect detection in multilayer structure

Determining information for defects on wafers

Methods and systems for selecting recipe for defect inspection

Determining information for defects on wafers

Reverse decoration for defect detection amplification

Determining a configuration for an optical element positioned in a...

Apparatus and methods for finding a best aperture and mode to enhan...

System and method to determine depth for optical wafer inspection

Apparatus and methods for finding a best aperture and mode to enhan...

Determining a configuration for an optical element positioned in a...

Apparatus and methods for determining defect depths in vertical sta...

System and method for apodization in a semiconductor device inspect...

Wafer and reticle inspection systems and methods for selecting illu...

System and method to determine depth for optical wafer inspection

Wafer and reticle inspection systems and methods for selecting illu...

System and method for apodization in a semiconductor device inspect...

Optical defect amplification for improved sensitivity on patterned...

Systems and methods for blocking specular reflection and suppressin...

Polarized broadband wafer inspection

Patents Applicationslast 30 patents

SHOT NOISE REDUCTION USING FRAME AVERAGING

INSPECTION WITH PREVIOUS STEP SUBTRACTION

PHASE FILTER FOR ENHANCED DEFECT DETECTION IN MULTILAYER STRUCTURE

DESIGN AIDED IMAGE RECONSTRUCTION

Determining Information for Defects on Wafers

Three-Dimensional Calibration Structures and Methods for Measuring...

Defect Discovery And Recipe Optimization For Inspection Of Three-Di...

Three-Dimensional Imaging For Semiconductor Wafer Inspection

Reverse Decoration for Defect Detection Amplification

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...

Determining a Configuration for an Optical Element Positioned in a...

WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...

System and Method for Apodization in a Semiconductor Device Inspect...

Determining a Configuration for an Optical Element Positioned in a...

Determining Information for Defects on Wafers

WAFER AND RETICLE INSPECTION SYSTEMS AND METHODS FOR SELECTING ILLU...

APPARATUS AND METHODS FOR FINDING A BEST APERTURE AND MODE TO ENHAN...

APPARATUS AND METHODS FOR DETERMINING DEFECT DEPTHS IN VERTICAL STA...

SYSTEM AND METHOD TO DETERMINE DEPTH FOR OPTICAL WAFER INSPECTION

System and Method for Apodization in a Semiconductor Device Inspect...

OPTICAL DEFECT AMPLIFICATION FOR IMPROVED SENSITIVITY ON PATTERNED...

SYSTEMS AND METHODS FOR BLOCKING SPECULAR REFLECTION AND SUPPRESSIN...