Robert M. Haney

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Mountain View, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Methods for plasma matching between different chambers and plasma s...
- Patent number 7,813,895
- Issue date Oct 12, 2010
- Applied Materials, Inc.
- Sairaju Tallavarjula
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR PLASMA MATCHING BETWEEN DIFFERENT CHAMBERS AND PLASMA S...
- Publication number 20090030632
- Publication date Jan 29, 2009
- SAIRAJU TALLAVARJULA
- G01 - MEASURING TESTING