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Robert M. McAndrew
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Austin, TX, US
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last 30 patents
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Patent Grant
Flexible equipment front end module interfaces, environmentally-con...
Patent number
10,159,169
Issue date
Dec 18, 2018
Applied Materials, Inc.
Joseph Vincent
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Grant
Methods and apparatus for displacing fluids from substrates using s...
Patent number
9,004,086
Issue date
Apr 14, 2015
Lam Research Corporation
Ronda K. Nixon
B08 - CLEANING
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Patent Grant
Single motor control for substrate handler in processing system
Patent number
6,057,662
Issue date
May 2, 2000
Applied Materials, Inc.
Robert M. McAndrew
G05 - CONTROLLING REGULATING
Patents Applications
last 30 patents
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Patent Application
FLEXIBLE EQUIPMENT FRONT END MODULE INTERFACES, ENVIRONMENTALLY-CON...
Publication number
20180124960
Publication date
May 3, 2018
Applied Materials, Inc.
Joseph Vincent
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHODS AND APPARATUS FOR DISPLACING FLUIDS FROM SUBSTRATES USING S...
Publication number
20120111379
Publication date
May 10, 2012
Ronda K. Nixon
B08 - CLEANING