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Robert Marks
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San Jose, CA, US
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last 30 patents
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Patent Grant
Chemical mechanical polisher with heater and method
Patent number
8,439,723
Issue date
May 14, 2013
Applied Materials, Inc.
Robert A. Marks
B24 - GRINDING POLISHING
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last 30 patents
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Patent Application
CHEMICAL MECHANICAL POLISHER WITH HEATER AND METHOD
Publication number
20100035515
Publication date
Feb 11, 2010
APPLIED MATERIALS, INC.
Robert Marks
B24 - GRINDING POLISHING