Robert Markunas

Person

Chapel Hill, NC, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer bonding hermetic encapsulation
- Patent number 7,622,324
- Issue date Nov 24, 2009
- Ziptronix
- Paul M. Enquist
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma processing system and method
- Patent number 7,112,536
- Issue date Sep 26, 2006
- Research Triangle Institute
- Robert J. Markunas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer bonding hermetic encapsulation
- Patent number 6,822,326
- Issue date Nov 23, 2004
- Ziptronix
- Paul M. Enquist
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Plasma processing system and method
- Patent number 6,558,504
- Issue date May 6, 2003
- Research Triangle Institute
- Robert J. Markunas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma furnace disposal of hazardous wastes
- Patent number 6,552,295
- Issue date Apr 22, 2003
- Research Triangle Institute
- Robert J. Markunas
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Line plasma vapor phase deposition apparatus and method
- Patent number 5,908,565
- Issue date Jun 1, 1999
- Sharp Kabushiki Kaisha
- Tatsuo Morita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of fabricating a thin film transistor
- Patent number 5,585,292
- Issue date Dec 17, 1996
- Sharp Kabushiki
- Tatsuo Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for microwave processing of materials
- Patent number 5,521,360
- Issue date May 28, 1996
- Martin Marietta Energy Systems, Inc.
- Arvid C. Johnson
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Process and apparatus for chemical vapor deposition of diamond film...
- Patent number 5,480,686
- Issue date Jan 2, 1996
- Research Triangle Institute
- Ronald A. Rudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition of diamond films using water-based plasma...
- Patent number 5,418,018
- Issue date May 23, 1995
- Research Triangle Institute
- Ronald A. Rudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Remote plasma enhanced CVD method and apparatus for growing an epit...
- Patent number 5,180,435
- Issue date Jan 19, 1993
- Research Triangle Institute, Inc.
- Robert J. Markunas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Semiconductor device having a semiconductor substrate interfaced to...
- Patent number 5,168,330
- Issue date Dec 1, 1992
- Research Triangle Institute
- Daniel J. Vitkavage
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote plasma enhanced CVD method and apparatus for growing an epit...
- Patent number 5,018,479
- Issue date May 28, 1991
- Reserach Triangle Institute, Inc.
- Robert J. Markunas
- C30 - CRYSTAL GROWTH
Information Patent Grant
Remote plasma enhanced CVD method for growing an epitaxial semicond...
- Patent number 4,870,030
- Issue date Sep 26, 1989
- Research Triangle Institute, Inc.
- Robert J. Markunas
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Wafer bonding hermetic encapsulation
- Publication number 20050009246
- Publication date Jan 13, 2005
- Ziptronix, Inc.
- Paul M. Enquist
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer bonding hermetic encapsulation
- Publication number 20040058476
- Publication date Mar 25, 2004
- Ziptronix
- Paul M. Enquist
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Plasama processing system and method
- Publication number 20030106641
- Publication date Jun 12, 2003
- Research Triangle Insitute
- Robert J. Markunas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma furnace disposal of hazardous wastes
- Publication number 20020040889
- Publication date Apr 11, 2002
- Research Triangle Institute
- Robert J. Markunas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Robert Markunas

Person

Patents Grantslast 30 patents

Wafer bonding hermetic encapsulation

Plasma processing system and method

Wafer bonding hermetic encapsulation

Plasma processing system and method

Plasma furnace disposal of hazardous wastes

Line plasma vapor phase deposition apparatus and method

Method of fabricating a thin film transistor

Apparatus and method for microwave processing of materials

Process and apparatus for chemical vapor deposition of diamond film...

Chemical vapor deposition of diamond films using water-based plasma...

Remote plasma enhanced CVD method and apparatus for growing an epit...

Semiconductor device having a semiconductor substrate interfaced to...

Remote plasma enhanced CVD method and apparatus for growing an epit...

Remote plasma enhanced CVD method for growing an epitaxial semicond...

Patents Applicationslast 30 patents

Wafer bonding hermetic encapsulation

Wafer bonding hermetic encapsulation

Plasama processing system and method

Plasma furnace disposal of hazardous wastes