Robert Nowak

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Vienna, AT

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Patents Grantslast 30 patents

Information Patent Grant
Method for maskless particle-beam exposure
- Patent number 8,222,621
- Issue date Jul 17, 2012
- IMS Nanofabrication AG
- Heinrich Fragner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Pattern lock system for particle-beam exposure apparatus
- Patent number 7,772,574
- Issue date Aug 10, 2010
- IMS Nanofabrication AG
- Gerhard Stengl
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical projection system
- Patent number 7,388,217
- Issue date Jun 17, 2008
- IMS Nanofabrication GmbH
- Herbert Buschbeck
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Maskless particle-beam system for exposing a pattern on a substrate
- Patent number 6,768,125
- Issue date Jul 27, 2004
- IMS Nanofabrication, GmbH
- Elmar Platzgummer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern lock system
- Patent number 6,661,015
- Issue date Dec 9, 2003
- IMS-Ionen Mikrofabrikations Systeme GmbH
- Alfred Chalupka
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR MASKLESS PARTICLE-BEAM EXPOSURE
- Publication number 20100127185
- Publication date May 27, 2010
- IMS Nanofabrication AG
- Heinrich Fragner
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern Lock System for Particle-Beam Exposure Apparatus
- Publication number 20090146082
- Publication date Jun 11, 2009
- IMS Nanofabrication AG
- Gerhard Stengl
- B82 - NANO-TECHNOLOGY
Information Patent Application
Particle-optical projection system
- Publication number 20070125956
- Publication date Jun 7, 2007
- Herbert Buschbeck
- B82 - NANO-TECHNOLOGY
Information Patent Application
Particle-optical projection system
- Publication number 20050201246
- Publication date Sep 15, 2005
- IMS Nanofabrication GmbH
- Herbert Buschbeck
- B82 - NANO-TECHNOLOGY
Information Patent Application
Maskless particle-beam system for exposing a pattern on a substrate
- Publication number 20030155534
- Publication date Aug 21, 2003
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Application
Pattern lock system
- Publication number 20020033457
- Publication date Mar 21, 2002
- Alfred Chalupka
- H01 - BASIC ELECTRIC ELEMENTS