Robert O. Hunter, Jr.

Person

San Diego, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 7,871,002
- Issue date Jan 18, 2011
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 7,871,004
- Issue date Jan 18, 2011
- Litel Instruments
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems and methods for determination of focus and telecentricity,...
- Patent number 7,846,624
- Issue date Dec 7, 2010
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for determination of source polarization matrix
- Patent number 7,697,138
- Issue date Apr 13, 2010
- Litel Instruments
- Adlai H. Smith
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for measurement of exit pupil transmittance
- Patent number 7,688,426
- Issue date Mar 30, 2010
- Litel Instruments
- Adlai H. Smith
- G02 - OPTICS
Information Patent Grant
Apparatus and process for determination of dynamic lens field curva...
- Patent number 7,671,979
- Issue date Mar 2, 2010
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for embedded encoding of overlay data ordering...
- Patent number 7,598,006
- Issue date Oct 6, 2009
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for measurement of crossfield chromatic respon...
- Patent number 7,544,449
- Issue date Jun 9, 2009
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ interferometer arrangement
- Patent number 7,515,250
- Issue date Apr 7, 2009
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reference wafer calibration reticle
- Patent number 7,381,503
- Issue date Jun 3, 2008
- Litel Instruments
- Adlai H. Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for registration with integral alignment optics
- Patent number 7,337,552
- Issue date Mar 4, 2008
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and process for the determination of static lens field cu...
- Patent number 7,295,291
- Issue date Nov 13, 2007
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ interferometer arrangement
- Patent number 7,286,208
- Issue date Oct 23, 2007
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ interferometer arrangement
- Patent number 7,283,202
- Issue date Oct 16, 2007
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced wafer stage positional err...
- Patent number 7,271,905
- Issue date Sep 18, 2007
- Litel Instruments
- Adlai Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced dynamic step and scan intr...
- Patent number 7,268,360
- Issue date Sep 11, 2007
- Litel Instruments
- Adlai H. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for determination of optimized exposure conditions for tran...
- Patent number 7,261,985
- Issue date Aug 28, 2007
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reference wafer and process for manufacturing same
- Patent number 7,261,983
- Issue date Aug 28, 2007
- Litel Instruments
- Adlai H. Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Reference wafer and process for manufacturing same
- Patent number 7,160,657
- Issue date Jan 9, 2007
- Litel Instruments
- Adlai Smith
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method and apparatus for self-referenced dynamic step and scan intr...
- Patent number 7,136,144
- Issue date Nov 14, 2006
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and process for determination of dynamic scan field curva...
- Patent number 7,126,668
- Issue date Oct 24, 2006
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method and apparatus for self-referenced projection lens distortion...
- Patent number 7,099,011
- Issue date Aug 29, 2006
- Litel Instruments
- Bruce McArthur
- G02 - OPTICS
Information Patent Grant
Apparatus and method for high resolution in-situ illumination sourc...
- Patent number 7,088,427
- Issue date Aug 8, 2006
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process for amelioration of scanning synchronization error
- Patent number 7,053,979
- Issue date May 30, 2006
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
In-situ interferometer arrangement
- Patent number 6,963,390
- Issue date Nov 8, 2005
- Litel Instruments
- Adlai H. Smith
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR MEASUREMENT OF EXIT PUPIL TRANSMITTANCE
- Publication number 20110007298
- Publication date Jan 13, 2011
- LITEL INSTRUMENTS
- Adlai H. Smith
- G02 - OPTICS

Robert O. Hunter, Jr.

Person

Patents Grantslast 30 patents

Method and apparatus for self-referenced wafer stage positional err...

Method and apparatus for self-referenced wafer stage positional err...

Systems and methods for determination of focus and telecentricity,...

Method and apparatus for determination of source polarization matrix

Method and apparatus for measurement of exit pupil transmittance

Apparatus and process for determination of dynamic lens field curva...

Method and apparatus for embedded encoding of overlay data ordering...

Method and apparatus for measurement of crossfield chromatic respon...

In-situ interferometer arrangement

Reference wafer calibration reticle

Method and apparatus for registration with integral alignment optics

Apparatus and process for the determination of static lens field cu...

In-situ interferometer arrangement

In-situ interferometer arrangement

Method and apparatus for self-referenced wafer stage positional err...

Method and apparatus for self-referenced dynamic step and scan intr...

Process for determination of optimized exposure conditions for tran...

Reference wafer and process for manufacturing same

Reference wafer and process for manufacturing same

Method and apparatus for self-referenced dynamic step and scan intr...

Apparatus and process for determination of dynamic scan field curva...

Method and apparatus for self-referenced projection lens distortion...

Apparatus and method for high resolution in-situ illumination sourc...

Process for amelioration of scanning synchronization error

In-situ interferometer arrangement

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR MEASUREMENT OF EXIT PUPIL TRANSMITTANCE