Robert P. Akins

Person

Escondido, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and system for managing light source operation
- Patent number 8,295,316
- Issue date Oct 23, 2012
- Cymer, Inc.
- Robert P. Akins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High repetition rate laser produced plasma EUV light source
- Patent number 7,361,918
- Issue date Apr 22, 2008
- Cymer, Inc.
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High repetition rate laser produced plasma EUV light source
- Patent number 7,087,914
- Issue date Aug 8, 2006
- Cymer, Inc.
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for, and method of, maintaining a clean window in a laser
- Patent number 5,359,620
- Issue date Oct 25, 1994
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,048,041
- Issue date Sep 10, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,033,055
- Issue date Jul 16, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,029,177
- Issue date Jul 2, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,027,366
- Issue date Jun 25, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,023,884
- Issue date Jun 11, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,018,162
- Issue date May 21, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser
- Patent number 5,018,161
- Issue date May 21, 1991
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compact excimer laser including an electrode mounted in insulating...
- Patent number 4,959,840
- Issue date Sep 25, 1990
- Cymer Laser Technologies
- Robert P. Akins
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and System for Managing Light Source Operation
- Publication number 20110235663
- Publication date Sep 29, 2011
- Robert P. Akins
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and methods for filtering out-of-band radiation in EUV expos...
- Publication number 20090250637
- Publication date Oct 8, 2009
- Cymer, Inc.
- Robert P. Akins
- G02 - OPTICS
Information Patent Application
High repetition rate laser produced plasma EUV light source
- Publication number 20080197297
- Publication date Aug 21, 2008
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Systems and methods to shape laser light as a homogeneous line beam...
- Publication number 20070096008
- Publication date May 3, 2007
- Cymer, Inc.
- Robert P. Akins
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Web-based method for information services
- Publication number 20070088794
- Publication date Apr 19, 2007
- Cymer, Inc.
- Robert P. Akins
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
High repetition rate laser produced plasma EUV light source
- Publication number 20070029511
- Publication date Feb 8, 2007
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
High repetition rate laser produced plasma EUV light source
- Publication number 20050205810
- Publication date Sep 22, 2005
- Robert P. Akins
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Robert P. Akins

Person

Patents Grantslast 30 patents

Method and system for managing light source operation

High repetition rate laser produced plasma EUV light source

High repetition rate laser produced plasma EUV light source

Apparatus for, and method of, maintaining a clean window in a laser

Compact excimer laser

Compact excimer laser

Compact excimer laser

Compact excimer laser

Compact excimer laser

Compact excimer laser

Compact excimer laser

Compact excimer laser including an electrode mounted in insulating...

Patents Applicationslast 30 patents

Method and System for Managing Light Source Operation

System and methods for filtering out-of-band radiation in EUV expos...

High repetition rate laser produced plasma EUV light source

Systems and methods to shape laser light as a homogeneous line beam...

Web-based method for information services

High repetition rate laser produced plasma EUV light source

High repetition rate laser produced plasma EUV light source