Robert P. Meagley

Person

Hillsboro, OR, US

People

Patents Grantslast 30 patents

Information Patent Grant
Wafer processing equipment having capacitive micro sensors
- Patent number 10,923,405
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Leonard Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing equipment having capacitive micro sensors
- Patent number 10,083,883
- Issue date Sep 25, 2018
- Applied Materials, Inc.
- Leonard Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming semiconductor structures
- Patent number 8,513,111
- Issue date Aug 20, 2013
- Intel Corporation
- Robert P. Meagley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pixelated photoresists
- Patent number 8,003,293
- Issue date Aug 23, 2011
- Intel Corporation
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Helical pixilated photoresist
- Patent number 7,875,415
- Issue date Jan 25, 2011
- Intel Corporation
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoactive adhesion promoter in a slam
- Patent number 7,723,008
- Issue date May 25, 2010
- Intel Corporation
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoactive adhesion promoter in a SLAM
- Patent number 7,718,528
- Issue date May 18, 2010
- Intel Corporation
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and compositions for providing photoresist with improved pr...
- Patent number 7,678,527
- Issue date Mar 16, 2010
- Intel Corporation
- Robert P Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sealing porous dielectric materials
- Patent number 7,658,975
- Issue date Feb 9, 2010
- Intel Corporation
- Grant Kloster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Branching self-assembling photoresist with decomposable backbone
- Patent number 7,615,329
- Issue date Nov 10, 2009
- Intel Corporation
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoactive resist capping layer
- Patent number 7,615,337
- Issue date Nov 10, 2009
- Intel Corporation
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photoactive adhesion promoter
- Patent number 7,611,828
- Issue date Nov 3, 2009
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method to modulate etch rate in SLAM
- Patent number 7,572,732
- Issue date Aug 11, 2009
- Intel Corporation
- Michael D. Goodner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing porous dielectric materials
- Patent number 7,560,165
- Issue date Jul 14, 2009
- Intel Corporation
- Grant Kloster
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoactive adhesion promoter
- Patent number 7,501,230
- Issue date Mar 10, 2009
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metal ion separation from aqueous solutions using photoswitchable i...
- Patent number 7,452,728
- Issue date Nov 18, 2008
- Intel Corporation
- Bob E. Leet
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Unidirectionally conductive materials for interconnection
- Patent number 7,405,419
- Issue date Jul 29, 2008
- Intel Corporation
- Reza M. Golzarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Immersion liquids with siloxane polymer for immersion lithography
- Patent number 7,391,501
- Issue date Jun 24, 2008
- Intel Corporation
- Hai Deng
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Enhancing photoresist performance using electric fields
- Patent number 7,374,867
- Issue date May 20, 2008
- Intel Corporation
- Robert Bristol
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method to assay sacrificial light absorbing materials and spin on g...
- Patent number 7,375,030
- Issue date May 20, 2008
- Intel Corporation
- Hok-Kin Choi
- G01 - MEASURING TESTING
Information Patent Grant
Anti-reflective coatings
- Patent number 7,361,455
- Issue date Apr 22, 2008
- Intel Corporation
- Shan C. Clark
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photosensitive dielectric layer
- Patent number 7,344,972
- Issue date Mar 18, 2008
- Intel Corporation
- Michael D. Goodner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrospray and enhanced electrospray deposition of thin films on...
- Patent number 7,259,109
- Issue date Aug 21, 2007
- Intel Corporation
- Robert P. Meagley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layered films formed by controlled phase segregation
- Patent number 7,241,707
- Issue date Jul 10, 2007
- Intel Corporation
- Robert P. Meagley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Basic quencher/developer solutions for photoresists
- Patent number 7,241,560
- Issue date Jul 10, 2007
- Intel Corporation
- Shan C. Clark
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Energy harvesting molecules and photoresist technology
- Patent number 7,235,344
- Issue date Jun 26, 2007
- Intel Corporation
- Robert P. Meagley
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Using perfluoropoly-ethers to form pellicles
- Patent number 7,214,452
- Issue date May 8, 2007
- Intel Corporation
- James M. Powers
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Photoacid generators based on novel superacids
- Patent number 7,192,686
- Issue date Mar 20, 2007
- Intel Corporation
- Robert P. Meagley
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Forming a dielectric layer using porogens
- Patent number 7,169,715
- Issue date Jan 30, 2007
- Intel Corporation
- Andrew W. Ott
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Enabling chain scission of branched photoresist
- Patent number 7,166,413
- Issue date Jan 23, 2007
- Intel Corporation
- Heidi B. Cao
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
WAFER PROCESSING EQUIPMENT HAVING CAPACITIVE MICRO SENSORS
- Publication number 20180374764
- Publication date Dec 27, 2018
- Applied Materials, Inc.
- Leonard Tedeschi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING EQUIPMENT HAVING CAPACITIVE MICRO SENSORS
- Publication number 20170365531
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Leonard Tedeschi
- G01 - MEASURING TESTING
Information Patent Application
PHOTOACTIVE ADHESION PROMOTER
- Publication number 20090076291
- Publication date Mar 19, 2009
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Enhancing photoresist performance using electric fields
- Publication number 20080220380
- Publication date Sep 11, 2008
- Robert Bristol
- B82 - NANO-TECHNOLOGY
Information Patent Application
Photoresists including amino acid polymers as photoimageable species
- Publication number 20080160446
- Publication date Jul 3, 2008
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REDUCTION OF LINE EDGE ROUGHNESS WITH A CONFORMAL COATING OF A SEALANT
- Publication number 20080145792
- Publication date Jun 19, 2008
- Manish Chandhok
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Branching self-assembling photoresist with decomposable backbone
- Publication number 20070207403
- Publication date Sep 6, 2007
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Helical pixilated photoresist
- Publication number 20070154836
- Publication date Jul 5, 2007
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOACTIVE ADHESION PROMOTER IN A SLAM
- Publication number 20070105383
- Publication date May 10, 2007
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Forming a dielectric layer using a hydrocarbon-containing precursor
- Publication number 20070032675
- Publication date Feb 8, 2007
- Robert P. Meagley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrospray and enhanced electrospray deposition of thin films on...
- Publication number 20060267156
- Publication date Nov 30, 2006
- Robert P. Meagley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Forming semiconductor structures
- Publication number 20060255432
- Publication date Nov 16, 2006
- Robert P. Meagley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method to assay sacrificial light absorbing materials and spin on g...
- Publication number 20060234495
- Publication date Oct 19, 2006
- Hok-Kin Choi
- G01 - MEASURING TESTING
Information Patent Application
Unidirectionally conductive materials for interconnection
- Publication number 20060228884
- Publication date Oct 12, 2006
- Reza M. Golzarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photoactive adhesion promoter in a slam
- Publication number 20060216634
- Publication date Sep 28, 2006
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method to modulate etch rate in SLAM
- Publication number 20060205221
- Publication date Sep 14, 2006
- Michael D. Goodner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Layered films formed by controlled phase segregation
- Publication number 20060183348
- Publication date Aug 17, 2006
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ultraviolet light transparent nanoparticles for photoresists
- Publication number 20060166132
- Publication date Jul 27, 2006
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pixelated photoresists
- Publication number 20060068318
- Publication date Mar 30, 2006
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Precursors for film formation
- Publication number 20060063394
- Publication date Mar 23, 2006
- Michael L. McSwiney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Controlling resist profiles through substrate modification
- Publication number 20060057506
- Publication date Mar 16, 2006
- Michael D. Goodner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Photoactive resist capping layer
- Publication number 20060046206
- Publication date Mar 2, 2006
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Basic quencher/developer solutions for photoresists
- Publication number 20060024616
- Publication date Feb 2, 2006
- Shan C. Clark
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Energy harvesting molecules and photoresist technology
- Publication number 20060003253
- Publication date Jan 5, 2006
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate imprinting techniques
- Publication number 20050260790
- Publication date Nov 24, 2005
- Michael D. Goodner
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Metal ion separation from aqueous solutions using photoswitchable i...
- Publication number 20050258107
- Publication date Nov 24, 2005
- Bob E. Leet
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
Photosensitive dielectric layer
- Publication number 20050239281
- Publication date Oct 27, 2005
- Michael D. Goodner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sealing porous dielectric materials
- Publication number 20050227094
- Publication date Oct 13, 2005
- Grant Kloster
- B32 - LAYERED PRODUCTS
Information Patent Application
Photoacid generators based on novel superacids
- Publication number 20050221220
- Publication date Oct 6, 2005
- Robert P. Meagley
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Novel anti-reflective coatings
- Publication number 20050221218
- Publication date Oct 6, 2005
- Shan C. Clark
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Robert P. Meagley

Person

Patents Grantslast 30 patents

Wafer processing equipment having capacitive micro sensors

Wafer processing equipment having capacitive micro sensors

Forming semiconductor structures

Pixelated photoresists

Helical pixilated photoresist

Photoactive adhesion promoter in a slam

Photoactive adhesion promoter in a SLAM

Methods and compositions for providing photoresist with improved pr...

Sealing porous dielectric materials

Branching self-assembling photoresist with decomposable backbone

Photoactive resist capping layer

Photoactive adhesion promoter

Method to modulate etch rate in SLAM

Sealing porous dielectric materials

Photoactive adhesion promoter

Metal ion separation from aqueous solutions using photoswitchable i...

Unidirectionally conductive materials for interconnection

Immersion liquids with siloxane polymer for immersion lithography

Enhancing photoresist performance using electric fields

Method to assay sacrificial light absorbing materials and spin on g...

Anti-reflective coatings

Photosensitive dielectric layer

Electrospray and enhanced electrospray deposition of thin films on...

Layered films formed by controlled phase segregation

Basic quencher/developer solutions for photoresists

Energy harvesting molecules and photoresist technology

Using perfluoropoly-ethers to form pellicles

Photoacid generators based on novel superacids

Forming a dielectric layer using porogens

Enabling chain scission of branched photoresist

Patents Applicationslast 30 patents

WAFER PROCESSING EQUIPMENT HAVING CAPACITIVE MICRO SENSORS

WAFER PROCESSING EQUIPMENT HAVING CAPACITIVE MICRO SENSORS

PHOTOACTIVE ADHESION PROMOTER

Enhancing photoresist performance using electric fields

Photoresists including amino acid polymers as photoimageable species

REDUCTION OF LINE EDGE ROUGHNESS WITH A CONFORMAL COATING OF A SEALANT

Branching self-assembling photoresist with decomposable backbone

Helical pixilated photoresist

PHOTOACTIVE ADHESION PROMOTER IN A SLAM

Forming a dielectric layer using a hydrocarbon-containing precursor

Electrospray and enhanced electrospray deposition of thin films on...

Forming semiconductor structures

Method to assay sacrificial light absorbing materials and spin on g...

Unidirectionally conductive materials for interconnection

Photoactive adhesion promoter in a slam

Method to modulate etch rate in SLAM

Layered films formed by controlled phase segregation

Ultraviolet light transparent nanoparticles for photoresists

Pixelated photoresists

Precursors for film formation

Controlling resist profiles through substrate modification

Photoactive resist capping layer

Basic quencher/developer solutions for photoresists

Energy harvesting molecules and photoresist technology

Substrate imprinting techniques

Metal ion separation from aqueous solutions using photoswitchable i...

Photosensitive dielectric layer

Sealing porous dielectric materials

Photoacid generators based on novel superacids

Novel anti-reflective coatings