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Robert Press
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San Jose, CA, US
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last 30 patents
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Patent Grant
Measurement and control of wafer tilt for x-ray based metrology
Patent number
11,513,085
Issue date
Nov 29, 2022
KLA Corporation
Barry Blasenheim
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
X-Ray Scatterometry Based Measurements Of Memory Array Structures S...
Publication number
20240302301
Publication date
Sep 12, 2024
KLA Corporation
Sandeep Inampudi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Measurement And Control Of Wafer Tilt For X-Ray Based Metrology
Publication number
20210262950
Publication date
Aug 26, 2021
KLA Corporation
Barry Blasenheim
G01 - MEASURING TESTING