Robert R. Matthews

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Richmond, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Process for treatment of semiconductor wafers in a fluid
- Patent number 5,911,837
- Issue date Jun 15, 1999
- Legacy Systems, Inc.
- Robert Roger Matthews
- B08 - CLEANING
Information Patent Grant
Apparatus for the treatment of semiconductor wafers in a fluid
- Patent number 5,776,296
- Issue date Jul 7, 1998
- Legacy Systems, Inc.
- Robert Roger Matthews
- B08 - CLEANING
Information Patent Grant
Apparatus for the treatment and drying of semiconductor wafers in a...
- Patent number 5,727,578
- Issue date Mar 17, 1998
- Legacy Systems, Inc.
- Robert Roger Matthews
- B08 - CLEANING
Information Patent Grant
Process and apparatus for the treatment of semiconductor wafers in...
- Patent number 5,464,480
- Issue date Nov 7, 1995
- Legacy Systems, Inc.
- Robert R. Matthews
- B08 - CLEANING
Information Patent Grant
Semiconductor wafer end effector
- Patent number 5,429,251
- Issue date Jul 4, 1995
- Legacy Systems, Inc.
- Robert R. Matthews
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
System using ozonated acetic anhydride to remove photoresist materials
- Publication number 20080076689
- Publication date Mar 27, 2008
- Robert R. Matthews
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method and apparatus for removing organic layers
- Publication number 20040159335
- Publication date Aug 19, 2004
- P.C.T. Systems, Inc.
- Garry L. Montierth
- B08 - CLEANING