Robert Robertson

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for electrostatically maintaining substrate fl...
- Patent number 6,902,682
- Issue date Jun 7, 2005
- Applied Materials, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of annealing large area glass substrates
- Patent number 6,610,374
- Issue date Aug 26, 2003
- Applied Materials, Inc.
- Chuang-Chuang Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for electrostatically maintaining subtrate flatness
- Patent number 6,500,265
- Issue date Dec 31, 2002
- Applied Materials, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for white powder reduction in silicon nitride...
- Patent number 6,468,601
- Issue date Oct 22, 2002
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing amorphous silicon thin films onto large area...
- Patent number 6,444,277
- Issue date Sep 3, 2002
- Applied Materials, Inc.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition using a finger type shadow frame
- Patent number 6,355,108
- Issue date Mar 12, 2002
- Applied Komatsu Technology, Inc.
- Tae Kyung Won
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing amorphous silicon based films having controlle...
- Patent number 6,352,910
- Issue date Mar 5, 2002
- Applied Komatsu Technology, Inc.
- William R. Harshbarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for multilayer CVD processing in a single chamber
- Patent number 6,338,874
- Issue date Jan 15, 2002
- Applied Materials, Inc.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of annealing large area glass substrates
- Patent number 6,294,219
- Issue date Sep 25, 2001
- Applied Komatsu Technology, Inc.
- Chuang-Chuang Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for electrostatically maintaining substrate fl...
- Patent number 6,177,023
- Issue date Jan 23, 2001
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Annealing an amorphous film using microwave energy
- Patent number 6,172,322
- Issue date Jan 9, 2001
- Applied Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for white powder reduction in silicon nitride...
- Patent number 6,055,927
- Issue date May 2, 2000
- Applied Komatsu Technology, Inc.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual frequency excitation of plasma for film deposition
- Patent number 6,024,044
- Issue date Feb 15, 2000
- Applied Komatsu Technology, Inc.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of depositing amorphous silicon based films having controlle...
- Patent number 5,902,650
- Issue date May 11, 1999
- Applied Komatsu Technology, Inc.
- Jeff Feng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of high quality conformal silicon oxide thin films on gl...
- Patent number 5,861,197
- Issue date Jan 19, 1999
- Applied Materials, Inc.
- Kam Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of high quality conformal silicon oxide thin films for t...
- Patent number 5,851,602
- Issue date Dec 22, 1998
- Applied Materials, Inc.
- Kam Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single chamber CVD process for thin film transistors
- Patent number 5,589,233
- Issue date Dec 31, 1996
- Applied Materials, Inc.
- Kam Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step chemical vapor deposition method for thin film transistors
- Patent number 5,567,476
- Issue date Oct 22, 1996
- Applied Komatsu Technology, Inc.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-step chemical vapor deposition method for thin film transistors
- Patent number 5,441,768
- Issue date Aug 15, 1995
- Applied Materials, Inc.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma CVD of silicon nitride thin films on large area glass substr...
- Patent number 5,399,387
- Issue date Mar 21, 1995
- Applied Materials, Inc.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of limiting sticking of body to susceptor in a deposition tr...
- Patent number 5,380,566
- Issue date Jan 10, 1995
- Applied Materials, Inc.
- Robert Robertson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for protection of conductive surfaces in a pla...
- Patent number 5,366,585
- Issue date Nov 22, 1994
- Applied Materials, Inc.
- Robert Robertson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing ozone/TEOS silicon oxide films of reduced sur...
- Patent number 5,271,972
- Issue date Dec 21, 1993
- Applied Materials, Inc.
- Kurt Kwok
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for electrostatically maintaining substrate fl...
- Publication number 20050272273
- Publication date Dec 8, 2005
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and apparatus for electrostatically maintaining substrate fl...
- Publication number 20030070616
- Publication date Apr 17, 2003
- APPLIED MATERIALS, INC.
- Quanyuan Shang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of depositing amorphous silicon based films having controlle...
- Publication number 20020115269
- Publication date Aug 22, 2002
- APPLIED MATERIALS, INC.
- William R. Harshbarger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of annealing large area glass substrates
- Publication number 20020018862
- Publication date Feb 14, 2002
- Applied Kamatsu Technology, Inc.
- Chuang-Chuang Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Robert Robertson

Person

Patents Grantslast 30 patents

Method and apparatus for electrostatically maintaining substrate fl...

Method of annealing large area glass substrates

Apparatus for electrostatically maintaining subtrate flatness

Apparatus and method for white powder reduction in silicon nitride...

Method for depositing amorphous silicon thin films onto large area...

Film deposition using a finger type shadow frame

Method of depositing amorphous silicon based films having controlle...

Method for multilayer CVD processing in a single chamber

Method of annealing large area glass substrates

Method and apparatus for electrostatically maintaining substrate fl...

Annealing an amorphous film using microwave energy

Apparatus and method for white powder reduction in silicon nitride...

Dual frequency excitation of plasma for film deposition

Method of depositing amorphous silicon based films having controlle...

Deposition of high quality conformal silicon oxide thin films on gl...

Deposition of high quality conformal silicon oxide thin films for t...

Single chamber CVD process for thin film transistors

Multi-step chemical vapor deposition method for thin film transistors

Multi-step chemical vapor deposition method for thin film transistors

Plasma CVD of silicon nitride thin films on large area glass substr...

Method of limiting sticking of body to susceptor in a deposition tr...

Method and apparatus for protection of conductive surfaces in a pla...

Method for depositing ozone/TEOS silicon oxide films of reduced sur...

Patents Applicationslast 30 patents

Method and apparatus for electrostatically maintaining substrate fl...

Method and apparatus for electrostatically maintaining substrate fl...

Method of depositing amorphous silicon based films having controlle...

Method of annealing large area glass substrates