Robert S. Kearns

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Saratoga, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Stage with two substrate buffer station
- Patent number 6,854,948
- Issue date Feb 15, 2005
- Nanometrics Incorporated
- Blaine R. Spady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge gripped substrate loading and unloading method
- Patent number 6,485,253
- Issue date Nov 26, 2002
- Nanometrics Incorporated
- Joseph T. Adams
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Edge gripped substrate lift mechanism
- Patent number 6,343,905
- Issue date Feb 5, 2002
- Nanometrics Incorporated
- Joseph T. Adams
- H01 - BASIC ELECTRIC ELEMENTS