Robert S. Zeller

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Boston, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic projection apparatus, purge gas supply system and gas...
- Patent number 7,879,137
- Issue date Feb 1, 2011
- Entegris, Inc.
- Bipin S. Parekh
- G02 - OPTICS
Information Patent Grant
Lithographic projection apparatus, purge gas supply system and gas...
- Patent number 7,789,940
- Issue date Sep 7, 2010
- Entegris, Inc.
- Bipin S. Parekh

Patents Applicationslast 30 patents

Information Patent Application
Lithographic projection apparatus, gas purging method, device manuf...
- Publication number 20070030463
- Publication date Feb 8, 2007
- Bipin S. Parekh,Jeffrey J.Spiegelman,Robert S. Zeller and Russell J. Holmes
- Bipin S. Parekh
- G02 - OPTICS
Information Patent Application
Lithographic projection apparatus, gas purging method, device manuf...
- Publication number 20060285091
- Publication date Dec 21, 2006
- Bipin S. Parekh
- G02 - OPTICS