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Robert Siegel
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Reute, DE
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Patents Grants
last 30 patents
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Patent Grant
Micromechanical component, in particular a sensor element, having a...
Patent number
7,276,277
Issue date
Oct 2, 2007
Robert Bosch GmbH
Hans Artmann
G01 - MEASURING TESTING
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Patent Grant
Method for producing a diaphragm sensor array and diaphragm sensor...
Patent number
6,506,621
Issue date
Jan 14, 2003
Robert Bosch GmbH
Hans Artmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Micromechanical component, in particular a sensor element, having a...
Publication number
20020094435
Publication date
Jul 18, 2002
Hans Artmann
G01 - MEASURING TESTING