Robert T. Hirahara

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate chucking and dechucking methods
- Patent number 11,114,326
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Wendell Glenn Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for direct measurement of chucking force on an...
- Patent number 11,054,317
- Issue date Jul 6, 2021
- Applied Materials, Inc.
- Charles G. Potter
- G01 - MEASURING TESTING
Information Patent Grant
Method to remove residual charge on a electrostatic chuck during th...
- Patent number 10,347,522
- Issue date Jul 9, 2019
- Applied Materials, Inc.
- Wendell Glen Boyd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal radiation barrier for substrate processing chamber components
- Patent number 10,177,014
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for electrostatic chuck repair and refurbishment
- Patent number 10,049,908
- Issue date Aug 14, 2018
- Applied Materials, Inc.
- Govinda Raj
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
High temperature fine grain aluminum heater
- Patent number 9,917,001
- Issue date Mar 13, 2018
- Applied Materials, Inc.
- Abhi Desai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support chuck cooling for deposition chamber
- Patent number 9,865,489
- Issue date Jan 9, 2018
- Applied Materials, Inc.
- Brian West
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support chuck cooling for deposition chamber
- Patent number 9,668,373
- Issue date May 30, 2017
- Applied Materials, Inc.
- Brian West
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pad design for electrostatic chuck surface
- Patent number 9,613,846
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for electrostatic chuck repair and refurbishment
- Patent number 9,349,630
- Issue date May 24, 2016
- Applied Materials, Inc.
- Govinda Raj
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Measuring flow properties of multiple gas nozzles of a gas distributor
- Patent number 8,464,594
- Issue date Jun 18, 2013
- Applied Materials, Inc.
- Kadthala R. Narendrnath
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic chuck electrical balancing circuit repair
- Patent number 8,320,099
- Issue date Nov 27, 2012
- Applied Materials, Inc.
- Robert T. Hirahara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Electrostatic chuck electrical balancing circuit repair
- Patent number 8,064,185
- Issue date Nov 22, 2011
- Applied Materials, Inc.
- Robert T. Hirahara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR ELECTROSTATIC CHUCK CERAMIC SURFACING
- Publication number 20230238267
- Publication date Jul 27, 2023
- Ramesh GOPALAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIRELESS IN-SITU REAL-TIME MEASUREMENT OF ELECTROSTATIC CHUCKING FO...
- Publication number 20200194290
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- Ramesh Gopalan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DIRECT MEASUREMENT OF CHUCKING FORCE ON AN...
- Publication number 20200103294
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Charles G. Potter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CHUCKING AND DECHUCKING METHODS
- Publication number 20190206712
- Publication date Jul 4, 2019
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING TH...
- Publication number 20170263487
- Publication date Sep 14, 2017
- Applied Materials, Inc.
- Wendell Glen BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER
- Publication number 20170229334
- Publication date Aug 10, 2017
- Applied Materials, Inc.
- BRIAN WEST
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT
- Publication number 20160329230
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- Govinda RAJ
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
RADIALLY OUTWARD PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE
- Publication number 20160230269
- Publication date Aug 11, 2016
- Applied Materials, Inc.
- Govinda RAJ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE
- Publication number 20150146339
- Publication date May 28, 2015
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER
- Publication number 20140268479
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- BRIAN WEST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT
- Publication number 20140268478
- Publication date Sep 18, 2014
- Govinda RAJ
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS
- Publication number 20140165915
- Publication date Jun 19, 2014
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ELECTRICAL BALANCING CIRCUIT REPAIR
- Publication number 20120124819
- Publication date May 24, 2012
- Robert T. Hirahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING FLOW PROPERTIES OF MULTIPLE GAS NOZZLES OF A GAS DISTRIBUTOR
- Publication number 20110217208
- Publication date Sep 8, 2011
- Applied Materials, Inc.
- Kadthala R. NARENDRNATH
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCK ELECTRICAL BALANCING CIRCUIT REPAIR
- Publication number 20100061032
- Publication date Mar 11, 2010
- Robert T. Hirahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH TEMPERATURE FINE GRAIN ALUMINUM HEATER
- Publication number 20090184093
- Publication date Jul 23, 2009
- ABHI DESAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ASSEMBLY
- Publication number 20080190364
- Publication date Aug 14, 2008
- APPLIED MATERIALS, INC.
- Christopher Richard Mahon
- H01 - BASIC ELECTRIC ELEMENTS

Robert T. Hirahara

Person

Patents Grantslast 30 patents

Substrate chucking and dechucking methods

Method and apparatus for direct measurement of chucking force on an...

Method to remove residual charge on a electrostatic chuck during th...

Thermal radiation barrier for substrate processing chamber components

Methods and apparatus for electrostatic chuck repair and refurbishment

High temperature fine grain aluminum heater

Substrate support chuck cooling for deposition chamber

Substrate support chuck cooling for deposition chamber

Pad design for electrostatic chuck surface

Methods and apparatus for electrostatic chuck repair and refurbishment

Measuring flow properties of multiple gas nozzles of a gas distributor

Electrostatic chuck electrical balancing circuit repair

Electrostatic chuck electrical balancing circuit repair

Patents Applicationslast 30 patents

METHODS FOR ELECTROSTATIC CHUCK CERAMIC SURFACING

WIRELESS IN-SITU REAL-TIME MEASUREMENT OF ELECTROSTATIC CHUCKING FO...

METHOD AND APPARATUS FOR DIRECT MEASUREMENT OF CHUCKING FORCE ON AN...

SUBSTRATE CHUCKING AND DECHUCKING METHODS

METHOD TO REMOVE RESIDUAL CHARGE ON A ELECTROSTATIC CHUCK DURING TH...

SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER

METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT

RADIALLY OUTWARD PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE

PAD DESIGN FOR ELECTROSTATIC CHUCK SURFACE

SUBSTRATE SUPPORT CHUCK COOLING FOR DEPOSITION CHAMBER

METHODS AND APPARATUS FOR ELECTROSTATIC CHUCK REPAIR AND REFURBISHMENT

THERMAL RADIATION BARRIER FOR SUBSTRATE PROCESSING CHAMBER COMPONENTS

ELECTROSTATIC CHUCK ELECTRICAL BALANCING CIRCUIT REPAIR

MEASURING FLOW PROPERTIES OF MULTIPLE GAS NOZZLES OF A GAS DISTRIBUTOR

ELECTROSTATIC CHUCK ELECTRICAL BALANCING CIRCUIT REPAIR

HIGH TEMPERATURE FINE GRAIN ALUMINUM HEATER

SUBSTRATE SUPPORT ASSEMBLY