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Robert W. Sherrill
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San Rafael, CA, US
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Patents Grants
last 30 patents
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Patent Grant
System and method for mid-pressure dense phase gas and ultrasonic c...
Patent number
7,361,231
Issue date
Apr 22, 2008
EKC Technology, Inc.
Michael A. Fury
B08 - CLEANING
Information
Patent Grant
Load lock system for supercritical fluid cleaning
Patent number
7,226,512
Issue date
Jun 5, 2007
EKC Technology, Inc.
Michael A. Fury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated dense phase fluid cleaning system
Patent number
6,857,437
Issue date
Feb 22, 2005
EKC Technology, Inc.
Michael A. Fury
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
Load lock system for supercritical fluid cleaning
Publication number
20070246074
Publication date
Oct 25, 2007
Michael A. Fury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for mid-pressure dense phase gas and ultrasonic c...
Publication number
20070000521
Publication date
Jan 4, 2007
Michael A. Fury
B08 - CLEANING
Information
Patent Application
Automated dense phase fluid cleaning system
Publication number
20040255978
Publication date
Dec 23, 2004
Michael A. Fury
B08 - CLEANING
Information
Patent Application
Load lock system for supercritical fluid cleaning
Publication number
20040255979
Publication date
Dec 23, 2004
Michael A. Fury
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and method for cleaning of workpieces using supercritical ca...
Publication number
20040244818
Publication date
Dec 9, 2004
Michael A. Fury
B08 - CLEANING