Robert W. Walsh

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Cupertino, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Auto focus system for reticle inspection
- Patent number 8,928,895
- Issue date Jan 6, 2015
- KLA-Tencor Corporation
- Michael J. Wright
- G01 - MEASURING TESTING
Information Patent Grant
Auto focus system for reticle inspection
- Patent number 7,835,015
- Issue date Nov 16, 2010
- KLA-Tencor Corporation
- Michael J. Wright
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam inspection apparatus and method
- Patent number 7,486,393
- Issue date Feb 3, 2009
- KLA Tencor
- Damon F. Kvamme
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam inspection apparatus and method
- Patent number 7,352,457
- Issue date Apr 1, 2008
- KLA-Tencor Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam inspection apparatus and method
- Patent number 7,075,638
- Issue date Jul 11, 2006
- KLA-Tenor Technologies Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam inspection apparatus and method
- Patent number 6,879,390
- Issue date Apr 12, 2005
- KLA-Tencor Technologies Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING
Information Patent Grant
Multiple beam inspection apparatus and method
- Patent number 6,636,301
- Issue date Oct 21, 2003
- KLA-Tencor Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Auto Focus System for Reticle Inspection
- Publication number 20110019206
- Publication date Jan 27, 2011
- KLA-Tencor Corporation
- Michael J. Wright
- G01 - MEASURING TESTING
Information Patent Application
MULTIPLE BEAM INSPECTION APPARATUS AND METHOD
- Publication number 20080018883
- Publication date Jan 24, 2008
- KLA-Tencor Technologies Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING
Information Patent Application
Multiple beam inspection apparatus and method
- Publication number 20060209298
- Publication date Sep 21, 2006
- KLA-Tencor Technologies Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING
Information Patent Application
Multiple beam inspection apparatus and method
- Publication number 20050174570
- Publication date Aug 11, 2005
- KLA-Tencor Technologies Corporation
- Damon F. Kvamme
- G01 - MEASURING TESTING