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Robert Wiman Carter III
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Macungie, PA, US
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Patent Application
Fluorine Based Chamber Clean With Nitrogen Trifluoride Backup
Publication number
20130017644
Publication date
Jan 17, 2013
Air Products and Chemicals, Inc.
Robert Wiman Carter
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...