Robert Wu

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San Diego, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Silicon carbide gas distribution plate and RF electrode for plasma...
- Patent number 7,992,518
- Issue date Aug 9, 2011
- Advanced Micro-Fabrication Equipment, Inc. Asia
- Robert Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Silicon Carbide Gas Distribution Plate and RF Electrode for Plasma...
- Publication number 20080202688
- Publication date Aug 28, 2008
- Robert Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...