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ROBERTA R. NOLAN-LOBMEYER
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WEST MELBOURNE, FL, US
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last 30 patents
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Patent Grant
SC-2 based pre-thermal treatment wafer cleaning process
Patent number
5,932,022
Issue date
Aug 3, 1999
Harris Corporation
Jack H. Linn
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
SC-2 BASED PRE-THERMAL TREATMENT WAFER CLEANING PROCESS
Publication number
20020189640
Publication date
Dec 19, 2002
JACK H. LINN
H01 - BASIC ELECTRIC ELEMENTS