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Roberto C. Longo Pazos
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Austin, TX, US
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Patents Grants
last 30 patents
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Patent Grant
Etching metal during processing of a semiconductor structure
Patent number
11,557,487
Issue date
Jan 17, 2023
Tokyo Electron Limited
Roberto C. Longo Pazos
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
Methods for Etching Molybdenum
Publication number
20240186149
Publication date
Jun 6, 2024
TOKYO ELECTRON LIMITED
Yun Han
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ETCHING METAL DURING PROCESSING OF A SEMICONDUCTOR STRUCTURE
Publication number
20220392773
Publication date
Dec 8, 2022
TOKYO ELECTRON LIMITED
Roberto C. Longo Pazos
H01 - BASIC ELECTRIC ELEMENTS