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Robertus Johannes Van Vliet
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Eersel, NL
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Patents Grants
last 30 patents
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Patent Grant
Lithographic apparatus immersion damage control
Patent number
7,170,583
Issue date
Jan 30, 2007
ASML Netherlands B.V.
Frits Van Der Meulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
LITHOGRAPHIC APPARATUS IMMERSION DAMAGE CONTROL
Publication number
20070002294
Publication date
Jan 4, 2007
ASML NETHERLANDS B.V.
Frits Van Der Meulen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY