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Robertus Nicodemus Jacobus Van Ballegoij
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,139,735
Issue date
Nov 27, 2018
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Gas flow optimization in reticle stage environment
Patent number
10,031,428
Issue date
Jul 24, 2018
ASML Netherlands B.V.
Koen Cuypers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluid extraction system, lithographic apparatus and device manufact...
Patent number
9,213,246
Issue date
Dec 15, 2015
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Fluid extraction system, lithographic apparatus and device manufact...
Patent number
8,654,309
Issue date
Feb 18, 2014
ASML Netherlands B.V.
Nicolaas Rudolf Kemper
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Grant
Lithographic projection apparatus, supporting assembly and device m...
Patent number
6,473,161
Issue date
Oct 29, 2002
ASML Netherlands B.V.
Martinus Agnes Willem Cuijpers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20170131642
Publication date
May 11, 2017
ASML NETHERLANDS B.V.
Johannes Jacobus Matheus BASELMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Gas Flow Optimization in Reticle Stage Environment
Publication number
20150355557
Publication date
Dec 10, 2015
ASML NETHERLANDS B.V.
Koen CUYPERS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACT...
Publication number
20140300879
Publication date
Oct 9, 2014
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
Lithographic projection apparatus, supporting assembly and device m...
Publication number
20020005939
Publication date
Jan 17, 2002
Martinus Agnes Willem Cuijpers
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...