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Robertus Nicodemus Jacobus Van Ballegoij
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Eindhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,361,911
Issue date
Apr 22, 2008
ASML Netherlands B.V.
Johannes Hubertus Josephina Moors
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,072,025
Issue date
Jul 4, 2006
ASML Netherlands B.V.
Henrikus Herman Marie Cox
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus, device manufacturing method and substrate h...
Patent number
7,030,967
Issue date
Apr 18, 2006
ASML Netherlands B.V.
Robertus Nicodemus Jacobus Van Ballegoij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
6,906,786
Issue date
Jun 14, 2005
ASML Netherlands B.V.
Henrikus Herman Marie Cox
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
FLUID EXTRACTION SYSTEM, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACT...
Publication number
20100149501
Publication date
Jun 17, 2010
ASML NETHERLANDS B.V.
Nicolaas Rudolf KEMPER
F01 - MACHINES OR ENGINES IN GENERAL ENGINE PLANTS IN GENERAL STEAM ENGINES
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050190351
Publication date
Sep 1, 2005
ASML NETHERLANDS B.V.
Henrikus Herman Marie Cox
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus, device manufacturing method and substrate h...
Publication number
20040179183
Publication date
Sep 16, 2004
ASML NETHERLANDS B.V.
Robertus Nicodemus Jacobus Van Ballegoij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20040008331
Publication date
Jan 15, 2004
ASML NETHERLANDS B.V.
Henrikus Herman Marie Cox
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR