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Robertus Victorius Maria Scheepens
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's-Hertogenbosch, NL
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last 30 patents
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Patent Grant
Alignment method, method of measuring front to backside alignment e...
Patent number
7,420,676
Issue date
Sep 2, 2008
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY