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Robertus Wilhelmus Van Der Heijden
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Tilburg, NL
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Patents Grants
last 30 patents
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Patent Grant
Method for controlling a manufacturing apparatus and associated app...
Patent number
11,669,017
Issue date
Jun 6, 2023
ASML Netherlands B.V.
Roy Werkman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,324,379
Issue date
Jun 18, 2019
ASML Netherlands B.V.
Cedric Marc Affentauschegg
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Apparatus and method for providing resist alignment marks in a doub...
Patent number
8,329,366
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Maya Angelova Doytcheva
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR CONTROLLING A MANUFACTURING APPARATUS AND ASSOCIATED APP...
Publication number
20200278614
Publication date
Sep 3, 2020
ASML NETHERLANDS B.V.
Roy WERKMAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20180173099
Publication date
Jun 21, 2018
ASML NETHERLANDS B.V.
Cedric Marc AFFENTAUSCHEGG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and Method for Providing Resist Alignment Marks in a Doub...
Publication number
20130017378
Publication date
Jan 17, 2013
ASML NETHERLANDS B.V.
Maya Angelova Doytcheva
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Lithographic Apparatus and Device Manufacturing Method
Publication number
20110003256
Publication date
Jan 6, 2011
ASML NETHERLANDS B.V.
Robertus Wilhelmus VAN DER HEIJDEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Apparatus and Method for Providing Resist Alignment Marks in a Doub...
Publication number
20100323171
Publication date
Dec 23, 2010
ASML Holding N.V.
Maya Angelova DOYTCHEVA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY