Robin K. F. Law

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Hong Kong, CN

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Patents Grantslast 30 patents

Information Patent Grant
Showerhead assembly for plasma processing chamber
- Patent number 8,617,349
- Issue date Dec 31, 2013
- Orbotech LT Solar, LLC.
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUSCEPTOR FOR PLASMA PROCESSING CHAMBER
- Publication number 20110315081
- Publication date Dec 29, 2011
- Kam S. Law
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY FOR PLASMA PROCESSING CHAMBER
- Publication number 20110088847
- Publication date Apr 21, 2011
- Kam S. LAW
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...