Robin KOSHY

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Single crystal metal oxide plasma chamber component
- Patent number 12,249,490
- Issue date Mar 11, 2025
- Lam Research Corporation
- Lin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz component with protective coating
- Patent number 11,087,961
- Issue date Aug 10, 2021
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for conditioning silicon part
- Patent number 9,947,558
- Issue date Apr 17, 2018
- Lam Research Corporation
- Lin Xu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
YTTRIUM ALUMINUM PEROVSKITE (YAP) BASED COATINGS FOR SEMICONDUCTOR...
- Publication number 20240212991
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SPARK PLASMA SINTERED COMPONENT FOR PLASMA PROCESSING CHAMBER
- Publication number 20230331633
- Publication date Oct 19, 2023
- LAM RESEARCH CORPORATION
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EROSION RESISTANT PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20230317424
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- Harmeet SINGH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL OXIDE WITH LOW TEMPERATURE FLUORINATION
- Publication number 20230295798
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Eric A. PAPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING A...
- Publication number 20230215703
- Publication date Jul 6, 2023
- LAM RESEARCH CORPORATION
- Robin KOSHY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
YTTRIUM ALUMINUM COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20230088848
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Lin XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE SINTERED COATINGS FOR PLASMA CHAMBERS
- Publication number 20230020387
- Publication date Jan 19, 2023
- LAM RESEARCH CORPORATION
- David Joseph WETZEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT
- Publication number 20220392753
- Publication date Dec 8, 2022
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20220246404
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Benjamin Philip HEINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE COATING TREATMENT
- Publication number 20220186354
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEXTURED SILICON SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
- Publication number 20220093370
- Publication date Mar 24, 2022
- LAM RESEARCH CORPORATION
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUARTZ COMPONENT WITH PROTECTIVE COATING
- Publication number 20210343510
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ COMPONENT WITH PROTECTIVE COATING
- Publication number 20190272981
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONDITIONING SILICON PART
- Publication number 20180047594
- Publication date Feb 15, 2018
- Lam Research Corporation
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS

Robin KOSHY

Person

Patents Grantslast 30 patents

Single crystal metal oxide plasma chamber component

Quartz component with protective coating

Method for conditioning silicon part

Patents Applicationslast 30 patents

YTTRIUM ALUMINUM PEROVSKITE (YAP) BASED COATINGS FOR SEMICONDUCTOR...

SPARK PLASMA SINTERED COMPONENT FOR PLASMA PROCESSING CHAMBER

EROSION RESISTANT PLASMA PROCESSING CHAMBER COMPONENTS

METAL OXIDE WITH LOW TEMPERATURE FLUORINATION

SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING A...

YTTRIUM ALUMINUM COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

LOW TEMPERATURE SINTERED COATINGS FOR PLASMA CHAMBERS

SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT

SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

SURFACE COATING TREATMENT

TEXTURED SILICON SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

QUARTZ COMPONENT WITH PROTECTIVE COATING

QUARTZ COMPONENT WITH PROTECTIVE COATING

METHOD FOR CONDITIONING SILICON PART