TREA

Robin L. TINER

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  • Santa Cruz, CA, US
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Patents Grantslast 30 patents

  • Information Patent Grant

    Deposition chamber system diffuser with increased power efficiency
    • Patent number 12,136,538
    • Issue date Nov 5, 2024
    • Applied Materials, Inc.
    • Changling Li
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Gas confiner assembly for eliminating shadow frame
    • Patent number 11,773,489
    • Issue date Oct 3, 2023
    • Applied Materials, Inc.
    • Lai Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method of removal of sharp corners from diffuser plate
    • Patent number 11,123,837
    • Issue date Sep 21, 2021
    • Applied Materials, Inc.
    • Ilyoung Hong
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Gas diffuser support structure for reduced particle generation
    • Patent number 10,927,461
    • Issue date Feb 23, 2021
    • Applied Materials, Inc.
    • Allen K. Lau
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Chamber liner
    • Patent number 10,923,327
    • Issue date Feb 16, 2021
    • Applied Materials, Inc.
    • Jianheng Li
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Gas diffuser mounting plate for reduced particle generation
    • Patent number 10,883,174
    • Issue date Jan 5, 2021
    • Applied Materials, Inc.
    • Allen K. Lau
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Corner spoiler for improving profile uniformity
    • Patent number 10,697,063
    • Issue date Jun 30, 2020
    • Applied Materials, Inc.
    • Lai Zhao
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Flip edge shadow frame
    • Patent number 10,676,817
    • Issue date Jun 9, 2020
    • Applied Materials, Inc.
    • Qunhua Wang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Diffuser temperature control
    • Patent number 10,487,401
    • Issue date Nov 26, 2019
    • Applied Materials, Inc.
    • Shinichi Kurita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Shadow frame with sides having a varied profile for improved deposi...
    • Patent number 10,468,221
    • Issue date Nov 5, 2019
    • Applied Materials, Inc.
    • Gaku Furuta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Grooved backing plate for standing wave compensation
    • Patent number 10,373,809
    • Issue date Aug 6, 2019
    • Applied Materials Inc.
    • Shinichi Kurita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma uniformity control by gas diffuser hole design
    • Patent number 10,312,058
    • Issue date Jun 4, 2019
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support assembly with non-uniform gas flow clearance
    • Patent number 10,280,510
    • Issue date May 7, 2019
    • Applied Materials, Inc.
    • Shinichi Kurita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma uniformity control by gas diffuser hole design
    • Patent number 10,262,837
    • Issue date Apr 16, 2019
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support with quadrants
    • Patent number 10,123,379
    • Issue date Nov 6, 2018
    • Applied Materials, Inc.
    • Robin L. Tiner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead support structure for improved gas flow
    • Patent number 10,087,524
    • Issue date Oct 2, 2018
    • Applied Materials, Inc.
    • Robin L. Tiner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tightly fitted ceramic insulator on large area electrode
    • Patent number 9,827,578
    • Issue date Nov 28, 2017
    • Applied Materials, Inc.
    • Jozef Kudela
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Showerhead support structures
    • Patent number 9,822,449
    • Issue date Nov 21, 2017
    • Applied Materials, Inc.
    • Robin L. Tiner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Anodized showerhead
    • Patent number 9,758,869
    • Issue date Sep 12, 2017
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support with quadrants
    • Patent number 9,677,177
    • Issue date Jun 13, 2017
    • Applied Materials, Inc.
    • Robin L. Tiner
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Susceptor assembly
    • Patent number D784276
    • Issue date Apr 18, 2017
    • Applied Materials, Inc.
    • Robin L. Tiner
    • D13 - Equipment for production, distribution, or transformation of energy
  • Information Patent Grant

    Diffuser support
    • Patent number 9,580,804
    • Issue date Feb 28, 2017
    • Applied Materials, Inc.
    • John M. White
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Method and apparatus for sealing an opening of a processing chamber
    • Patent number 9,458,538
    • Issue date Oct 4, 2016
    • Applied Materials, Inc.
    • Shinichi Kurita
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Ground return for plasma processes
    • Patent number 9,382,621
    • Issue date Jul 5, 2016
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Plasma uniformity control by gas diffuser hole design
    • Patent number 9,200,368
    • Issue date Dec 1, 2015
    • Applied Materials, Inc.
    • Soo Young Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Substrate support with ceramic insulation
    • Patent number 9,187,827
    • Issue date Nov 17, 2015
    • Applied Materials, Inc.
    • Gaku Furuta
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Tightly fitted ceramic insulator on large area electrode
    • Patent number 9,068,262
    • Issue date Jun 30, 2015
    • Applied Materials, Inc.
    • Jozef Kudela
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    RF bus and RF return bus for plasma chamber electrode
    • Patent number 8,992,723
    • Issue date Mar 31, 2015
    • Applied Material, Inc.
    • Carl A. Sorensen
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Susceptor with heater
    • Patent number D717113
    • Issue date Nov 11, 2014
    • Applied Materials, Inc.
    • Gaku Furuta
    • D07 - Equipment for preparing or serving food or drink not elsewhere specified
  • Information Patent Grant

    Susceptor with heater
    • Patent number D716098
    • Issue date Oct 28, 2014
    • Applied Materials, Inc.
    • Gaku Furuta
    • D07 - Equipment for preparing or serving food or drink not elsewhere specified

Patents Applicationslast 30 patents

  • Information Patent Application

    DEPOSITION CHAMBER SYSTEM DIFFUSER WITH INCREASED POWER EFFICIENCY
    • Publication number 20230122134
    • Publication date Apr 20, 2023
    • Applied Materials, Inc.
    • Changling Li
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    FLAT HEAD UNITS FOR HEAVY LOAD ALIGNMENT
    • Publication number 20220228616
    • Publication date Jul 21, 2022
    • Applied Materials, Inc.
    • Hassan Yousefi
    • F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
  • Information Patent Application

    GAS DIFFUSER MOUNTING PLATE FOR REDUCED PARTICLE GENERATION
    • Publication number 20200165726
    • Publication date May 28, 2020
    • Applied Materials, Inc.
    • Allen K. LAU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEAT CONDUCTIVE SPACER FOR PLASMA PROCESSING CHAMBER
    • Publication number 20200098549
    • Publication date Mar 26, 2020
    • Applied Materials, Inc.
    • Beom Soo PARK
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS DIFFUSER SUPPORT STRUCTURE FOR REDUCED PARTICLE GENERATION
    • Publication number 20200071833
    • Publication date Mar 5, 2020
    • Applied Materials, Inc.
    • Allen K. LAU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CHAMBER LINER
    • Publication number 20200043706
    • Publication date Feb 6, 2020
    • Applied Materials, Inc.
    • Jianheng LI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE
    • Publication number 20190193233
    • Publication date Jun 27, 2019
    • Applied Materials, Inc.
    • Ilyoung HONG
    • B24 - GRINDING POLISHING
  • Information Patent Application

    SHADOW FRAME WITH SIDES HAVING A VARIED PROFILE FOR IMPROVED DEPOSI...
    • Publication number 20190096624
    • Publication date Mar 28, 2019
    • Applied Materials, Inc.
    • Gaku FURUTA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
    • Publication number 20180025890
    • Publication date Jan 25, 2018
    • Applied Materials, Inc.
    • Soo Young CHOI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    RF RETURN STRAP SHIELDING COVER
    • Publication number 20170365449
    • Publication date Dec 21, 2017
    • Applied Materials, Inc.
    • Yi CUI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    NON-SHADOW FRAME PLASMA PROCESSING CHAMBER
    • Publication number 20170335459
    • Publication date Nov 23, 2017
    • Applied Materials, Inc.
    • Young-jin CHOI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT ASSEMBLY WITH NON-UNIFORM GAS FLOW CLEARANCE
    • Publication number 20170275759
    • Publication date Sep 28, 2017
    • Applied Materials, Inc.
    • Shinichi KURITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATED SUBSTRATE SUPPORT
    • Publication number 20170263422
    • Publication date Sep 14, 2017
    • Applied Materials, Inc.
    • Timothy Stuart OCHSNER
    • C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
  • Information Patent Application

    SUBSTRATE SUPPORT WITH QUADRANTS
    • Publication number 20170231033
    • Publication date Aug 10, 2017
    • Applied Materials, Inc.
    • Robin L. TINER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS DIFFUSER HAVING GROOVED HOLLOW CATHODES
    • Publication number 20170178867
    • Publication date Jun 22, 2017
    • Applied Materials, Inc.
    • Jozef KUDELA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    DIFFUSER TEMPERATURE CONTROL
    • Publication number 20170096738
    • Publication date Apr 6, 2017
    • Applied Materials, Inc.
    • Shinichi KURITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GROOVED BACKING PLATE FOR STANDING WAVE COMPENSATION
    • Publication number 20170092469
    • Publication date Mar 30, 2017
    • Applied Materials, Inc.
    • Shinichi KURITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    LARGE AREA DUAL SUBSTRATE PROCESSING SYSTEM
    • Publication number 20170084880
    • Publication date Mar 23, 2017
    • Applied Materials, Inc.
    • Shinichi KURITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHADOW FRAME WITH NON-UNIFORM GAS FLOW CLEARANCE FOR IMPROVED CLEANING
    • Publication number 20170081757
    • Publication date Mar 23, 2017
    • Applied Materials, Inc.
    • Shinichi KURITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD SUPPORT STRUCTURES
    • Publication number 20170081763
    • Publication date Mar 23, 2017
    • Applied Materials, Inc.
    • Robin L. TINER
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    GROUND RETURN FOR PLASMA PROCESSES
    • Publication number 20160305025
    • Publication date Oct 20, 2016
    • Applied Materials, Inc.
    • Soo Young CHOI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PLASMA UNIFORMITY CONTROL BY GAS DIFFUSER HOLE DESIGN
    • Publication number 20160056019
    • Publication date Feb 25, 2016
    • Applied Materials, Inc.
    • Soo Young CHOI
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REMOTE PLASMA CLEAN SOURCE FEED BETWEEN BACKING PLATE AND DIFFUSER
    • Publication number 20160032451
    • Publication date Feb 4, 2016
    • Applied Materials, Inc.
    • Shinichi KURITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    HEATING AND COOLING OF SUBSTRATE SUPPORT
    • Publication number 20150364350
    • Publication date Dec 17, 2015
    • Applied Materials, Inc.
    • John M. WHITE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    TIGHTLY FITTED CERAMIC INSULATOR ON LARGE AREA ELECTRODE
    • Publication number 20150273490
    • Publication date Oct 1, 2015
    • Applied Materials, Inc.
    • Jozef KUDELA
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
  • Information Patent Application

    CORNER SPOILER FOR IMPROVING PROFILE UNIFORMITY
    • Publication number 20150211120
    • Publication date Jul 30, 2015
    • Applied Materials, Inc.
    • Lai ZHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS CONFINER ASSEMBLY FOR ELIMINATING SHADOW FRAME
    • Publication number 20150211121
    • Publication date Jul 30, 2015
    • Applied Materials, Inc.
    • Lai ZHAO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SUBSTRATE SUPPORT WITH QUADRANTS
    • Publication number 20150114948
    • Publication date Apr 30, 2015
    • Applied Materials, Inc.
    • Robin L. TINER
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FLIP EDGE SHADOW FRAME
    • Publication number 20140251216
    • Publication date Sep 11, 2014
    • Qunhua WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHOWERHEAD SUPPORT STRUCTURE FOR IMPROVED GAS FLOW
    • Publication number 20140246521
    • Publication date Sep 4, 2014
    • Applied Materials, Inc.
    • Robin L. TINER
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...