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Robin MAIR
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West Chicago, IL, US
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Patents Grants
last 30 patents
Information
Patent Grant
Non-destructive inspection and manufacturing metrology systems and...
Patent number
12,092,565
Issue date
Sep 17, 2024
Onto Innovation Inc.
Manjusha Mehendale
G01 - MEASURING TESTING
Information
Patent Grant
Characterization of patterned structures using acoustic metrology
Patent number
11,988,641
Issue date
May 21, 2024
Onto Innovation Inc.
Manjusha Mehendale
G01 - MEASURING TESTING
Information
Patent Grant
Opto-acoustic measurement of a transparent film stack
Patent number
11,668,644
Issue date
Jun 6, 2023
Onto Innovation Inc.
George Andrew Antonelli
G01 - MEASURING TESTING
Information
Patent Grant
Non-destructive acoustic metrology for void detection
Patent number
9,991,176
Issue date
Jun 5, 2018
Rudolph Technologies, Inc.
Manjusha Mehendale
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical acoustic substrate assessment system and method
Patent number
9,576,862
Issue date
Feb 21, 2017
Rudolph Technologies, Inc.
Todd Murray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
Patent number
7,705,974
Issue date
Apr 27, 2010
Rudolph Technologies, Inc.
Robert Gregory Wolf
G01 - MEASURING TESTING
Information
Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
Patent number
7,522,272
Issue date
Apr 21, 2009
Rudolph Technologies, Inc.
Robert Gregory Wolf
G01 - MEASURING TESTING
Information
Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
Patent number
7,253,887
Issue date
Aug 7, 2007
Rudolph Technologies, Inc.
Robert Gregory Wolf
G01 - MEASURING TESTING
Information
Patent Grant
Metrology system with spectroscopic ellipsometer and photoacoustic...
Patent number
7,006,221
Issue date
Feb 28, 2006
Rudolph Technologies, Inc.
Robert Gregory Wolf
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND...
Publication number
20240402074
Publication date
Dec 5, 2024
ONTO INNOVATION INC.
Manjusha Mehendale
G01 - MEASURING TESTING
Information
Patent Application
MULTI PUMP-PROBE ENCODING-DECODING FOR OPTO-ACOUSTIC METROLOGY
Publication number
20240329005
Publication date
Oct 3, 2024
ONTO INNOVATION INC.
Michael J. Kotelyanskii
G01 - MEASURING TESTING
Information
Patent Application
A SYSTEM AND METHOD FOR PERFORMING ALIGNMENT AND OVERLAY MEASUREMEN...
Publication number
20240004311
Publication date
Jan 4, 2024
ONTO INNOVATION INC.
Manjusha Mehendale
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
OPTO-ACOUSTIC MEASUREMENT OF A TRANSPARENT FILM STACK
Publication number
20220317025
Publication date
Oct 6, 2022
ONTO INNOVATION INC.
George Andrew Antonelli
G01 - MEASURING TESTING
Information
Patent Application
NON-DESTRUCTIVE INSPECTION AND MANUFACTURING METROLOGY SYSTEMS AND...
Publication number
20220228973
Publication date
Jul 21, 2022
ONTO INNOVATION INC.
Manjusha MEHENDALE
G01 - MEASURING TESTING
Information
Patent Application
CHARACTERIZATION OF PATTERNED STRUCTURES USING ACOUSTIC METROLOGY
Publication number
20210318270
Publication date
Oct 14, 2021
ONTO INNOVATION INC.
Manjusha Mehendale
G01 - MEASURING TESTING
Information
Patent Application
NON-DESTRUCTIVE ACOUSTIC METROLOGY FOR VOID DETECTION
Publication number
20170221778
Publication date
Aug 3, 2017
The Regents of the University of Colorado
Manjusha MEHENDALE
G01 - MEASURING TESTING
Information
Patent Application
OPTICAL ACOUSTIC SUBSTRATE ASSESSMENT SYSTEM AND METHOD
Publication number
20160043008
Publication date
Feb 11, 2016
Todd MURRAY
G01 - MEASURING TESTING
Information
Patent Application
Metrology system with spectroscopic ellipsometer and photoacoustic...
Publication number
20090201502
Publication date
Aug 13, 2009
Robert Gregory Wolf
G01 - MEASURING TESTING
Information
Patent Application
Metrology system with spectroscopic ellipsometer and photoacoustic...
Publication number
20070268478
Publication date
Nov 22, 2007
Rudolph Technologies, Inc.
Robert Gregory Wolf
G01 - MEASURING TESTING
Information
Patent Application
Metrology system with spectroscopic ellipsometer and photoacoustic...
Publication number
20060126057
Publication date
Jun 15, 2006
Rudolph Technologies, Inc.
Robert Gregory Wolf
G01 - MEASURING TESTING
Information
Patent Application
Metrology system with spectroscopic ellipsometer and photoacoustic...
Publication number
20030076497
Publication date
Apr 24, 2003
Robert Gregory Wolf
G01 - MEASURING TESTING