Roderick Koehle

Person

Ottobrunn, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography systems and methods of manufacturing using thereof
- Patent number 8,715,909
- Issue date May 6, 2014
- Infineon Technologies AG
- Alois Gutmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic mask and method of forming a lithographic mask
- Patent number 8,293,431
- Issue date Oct 23, 2012
- Advanced Mask Technology Center GmbH & Co. KG
- Haiko Rolff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for checking periodic structures on lithography masks
- Patent number 7,424,144
- Issue date Sep 9, 2008
- Infineon Technologies AG
- Roderick Koehle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for optimizing a photolithographic mask
- Patent number 7,370,313
- Issue date May 6, 2008
- Infineon Technologies AG
- Christoph Noelscher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for inspection of periodic grating structures on lithography...
- Patent number 7,262,850
- Issue date Aug 28, 2007
- Infineon Technologies AG
- Wolfgang Dettmann
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining the construction of a mask for the micropatt...
- Patent number 6,993,455
- Issue date Jan 31, 2006
- Infineon Technologies AG
- Roderick Koehle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Lithographic Mask and Method of Forming a Lithographic Mask
- Publication number 20100266939
- Publication date Oct 21, 2010
- Haiko Rolff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Systems and Methods of Manufacturing Using Thereof
- Publication number 20090092926
- Publication date Apr 9, 2009
- Alois Gutmann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Systems and Methods of Manufacturing Using Thereof
- Publication number 20090091729
- Publication date Apr 9, 2009
- Sajan Marokkey
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for optimizing a photolithographic mask
- Publication number 20070038972
- Publication date Feb 15, 2007
- Christoph Noelscher
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for determining the construction of a mask for the micropatt...
- Publication number 20050148195
- Publication date Jul 7, 2005
- Infineon Technologies AG
- Roderick Koehle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for checking periodic structures on lithography masks
- Publication number 20050048379
- Publication date Mar 3, 2005
- Roderick Koehle
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for inspection of periodic grating structures on lithography...
- Publication number 20040165763
- Publication date Aug 26, 2004
- Wolfgang Dettmann
- G06 - COMPUTING CALCULATING COUNTING

Roderick Koehle

Person

Patents Grantslast 30 patents

Lithography systems and methods of manufacturing using thereof

Lithographic mask and method of forming a lithographic mask

Method for checking periodic structures on lithography masks

Method for optimizing a photolithographic mask

Method for inspection of periodic grating structures on lithography...

Method for determining the construction of a mask for the micropatt...

Patents Applicationslast 30 patents

Lithographic Mask and Method of Forming a Lithographic Mask

Lithography Systems and Methods of Manufacturing Using Thereof

Lithography Systems and Methods of Manufacturing Using Thereof

Method for optimizing a photolithographic mask

Method for determining the construction of a mask for the micropatt...

Method for checking periodic structures on lithography masks

Method for inspection of periodic grating structures on lithography...