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Rodney C. Ow
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Cupertino, CA, US
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last 30 patents
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Patent Grant
Apparatus and method for using a robot to remove a substrate carrie...
Patent number
6,520,726
Issue date
Feb 18, 2003
PRI Automation, Inc.
Gregory Cook
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer carrier adapter and method for use thereof
Patent number
6,165,268
Issue date
Dec 26, 2000
PRI Automation, Inc.
Rodney C. Ow
H01 - BASIC ELECTRIC ELEMENTS