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Rodney D. Simmons

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  • San Diego, CA, US
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    DROPLET DETECTION METROLOGY UTILIZING METROLOGY BEAM SCATTERING
    • Publication number 20240361222
    • Publication date Oct 31, 2024
    • ASML NETHERLANDS B.V.
    • Dustin Michael Urone
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Extreme ultraviolet light source
    • Publication number 20100176313
    • Publication date Jul 15, 2010
    • Cymer, Inc.
    • Stephan T. Melnychuk
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Systems and methods for target material delivery in a laser produce...
    • Publication number 20090230326
    • Publication date Sep 17, 2009
    • Cymer, Inc.
    • Georgiy O. Vaschenko
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Extreme ultraviolet light source
    • Publication number 20080023657
    • Publication date Jan 31, 2008
    • Cymer, Inc.
    • Stephen T. Melnychuk
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    EUV light source
    • Publication number 20070102653
    • Publication date May 10, 2007
    • Cymer, Inc.
    • Norbert R. Bowering
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Discharge produced plasma EUV light source
    • Publication number 20070023711
    • Publication date Feb 1, 2007
    • Igor V. Fomenkov
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    LPP EUV drive laser input system
    • Publication number 20060289806
    • Publication date Dec 28, 2006
    • Cymer, Inc.
    • Rodney D. Simmons
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Extreme ultraviolet light source
    • Publication number 20050230645
    • Publication date Oct 20, 2005
    • Cymer, Inc.
    • Stephan T. Melnychuk
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Discharge produced plasma EUV light source
    • Publication number 20040160155
    • Publication date Aug 19, 2004
    • William N. Partlo
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    Extreme ultraviolet light source
    • Publication number 20040108473
    • Publication date Jun 10, 2004
    • Stephan T. Melnychuk
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR