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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving fl...
Patent number
8,755,027
Issue date
Jun 17, 2014
ASML Netherlands B.V.
Matthew Lipson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,027,026
Issue date
Sep 27, 2011
ASML Netherlands B.V.
Matthew Lipson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Polarized radiation in lithographic apparatus and device manufactur...
Patent number
7,929,116
Issue date
Apr 19, 2011
ASML Netherlands B.V.
Christian Wagner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,894,040
Issue date
Feb 22, 2011
ASML Netherlands B.V.
Matthew Lipson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for providing modified illumination intensity
Patent number
7,602,475
Issue date
Oct 13, 2009
ASML Netherlands B.V.
Roel de Jonge
G02 - OPTICS
Information
Patent Grant
System and method for providing modified illumination intensity
Patent number
7,403,267
Issue date
Jul 22, 2008
ASML Netherlands B.V.
Roel de Jonge
G02 - OPTICS
Information
Patent Grant
Polarized radiation in lithographic apparatus and device manufactur...
Patent number
7,345,740
Issue date
Mar 18, 2008
ASML Netherlands B.V.
Christian Wagner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of manufacturing a device, and devic...
Patent number
7,283,208
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Johannes Catharinus Hubertus Mulkens
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110134402
Publication date
Jun 9, 2011
ASML NETHERLANDS B.V.
Matthew LIPSON
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and Method for Providing Modified Illumination Intensity
Publication number
20080309908
Publication date
Dec 18, 2008
ASML NETHERLANDS B.V.
Roel de Jonge
G02 - OPTICS
Information
Patent Application
Polarized radiation in lithographic apparatus and device manufactur...
Publication number
20080143992
Publication date
Jun 19, 2008
ASML NETHERLANDS B.V.
Christian Wagner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
System and method for providing modified illumination intensity
Publication number
20060227282
Publication date
Oct 12, 2006
ASML NETHERLANDS B.V.
Roel de Jonge
G02 - OPTICS
Information
Patent Application
Polarized radiation in lithographic apparatus and device manufactur...
Publication number
20060139612
Publication date
Jun 29, 2006
ASML NETHERLANDS B.V.
Christian Wagner
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060072088
Publication date
Apr 6, 2006
ASML NETHERLANDS B.V.
Matthew Lipson
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY