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Roger Alan Lindley
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Bonding structure of e chuck to aluminum base configuration
Patent number
11,794,441
Issue date
Oct 24, 2023
Applied Materials, Inc.
Vijay D. Parkhe
B32 - LAYERED PRODUCTS
Information
Patent Grant
Bonding structure of e chuck to aluminum base configuration
Patent number
11,192,323
Issue date
Dec 7, 2021
Applied Materials, Inc.
Vijay D. Parkhe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for coupling a voltage to spatially segmented portions of th...
Patent number
10,763,150
Issue date
Sep 1, 2020
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding structure of E chuck to aluminum base configuration
Patent number
10,688,750
Issue date
Jun 23, 2020
Applied Materials, Inc.
Vijay D. Parkhe
B32 - LAYERED PRODUCTS
Information
Patent Grant
Multiple electrode substrate support assembly and phase control system
Patent number
10,153,139
Issue date
Dec 11, 2018
Applied Materials, Inc.
Yang Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for shaping a magnetic field in a magnetic fie...
Patent number
8,936,696
Issue date
Jan 20, 2015
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirro...
Patent number
8,617,351
Issue date
Dec 31, 2013
Applied Materials, Inc.
Daniel J. Hoffman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for automated validation of semiconductor proc...
Patent number
8,527,081
Issue date
Sep 3, 2013
Applied Materials, Inc.
Charles Hardy
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Plasma processing chamber with enhanced gas delivery
Patent number
8,382,939
Issue date
Feb 26, 2013
Applied Materials, Inc.
Michael Charles Kutney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetic confinement of a plasma
Patent number
8,092,605
Issue date
Jan 10, 2012
Applied Materials, Inc.
Steven C. Shannon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for shaping a magnetic field in a magnetic field-enhanced pl...
Patent number
8,048,328
Issue date
Nov 1, 2011
Applied Materials, Inc.
Roger A. Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma processing apparatus
Patent number
7,972,469
Issue date
Jul 5, 2011
Applied Materials, Inc.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for shaping a magnetic field in a magnetic field-enhanced pl...
Patent number
7,883,633
Issue date
Feb 8, 2011
Applied Materials, Inc.
Roger A. Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for shaping a magnetic field in a magnetic fie...
Patent number
7,879,186
Issue date
Feb 1, 2011
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for shaping a magnetic field in a magnetic fie...
Patent number
7,422,654
Issue date
Sep 9, 2008
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for providing uniform plasma in a magnetic fie...
Patent number
7,374,636
Issue date
May 20, 2008
Applied Materials, Inc.
Keiji Horioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for controlling the magnetic field intensity i...
Patent number
7,316,199
Issue date
Jan 8, 2008
Applied Materials, Inc.
Keiji Horioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma pretreatment of photoresist in an oxide etch process
Patent number
6,326,307
Issue date
Dec 4, 2001
Appllied Materials, Inc.
Roger A. Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically-enhanced plasma chamber with non-uniform magnetic field
Patent number
6,113,731
Issue date
Sep 5, 2000
Applied Materials, Inc.
Hongching Shan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Diagnostic pedestal assembly for a semiconductor wafer processing s...
Patent number
5,989,349
Issue date
Nov 23, 1999
Applied Materials, Inc.
Kuang-Han Ke
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
DIGITAL SIMULATION FOR SEMICONDUCTOR MANUFACTURING PROCESSES
Publication number
20240329626
Publication date
Oct 3, 2024
Applied Materials, Inc.
Kay Siong NG
G05 - CONTROLLING REGULATING
Information
Patent Application
MACHINE LEARNING MODEL FOR SEMICONDUCTOR MANUFACTURING PROCESSES
Publication number
20240332092
Publication date
Oct 3, 2024
Applied Materials, Inc.
Zhiqiang HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADJUSTING CHAMBER PERFORMANCE BY EQUIPMENT CONSTANT UPDATES
Publication number
20240176334
Publication date
May 30, 2024
Applied Materials, Inc.
Sidharth Bhatia
G05 - CONTROLLING REGULATING
Information
Patent Application
DETERMINING EQUIPMENT CONSTANT UPDATES BY MACHINE LEARNING
Publication number
20240176312
Publication date
May 30, 2024
Applied Materials, Inc.
Sidharth Bhatia
G05 - CONTROLLING REGULATING
Information
Patent Application
CHAMBER MATCHING BY EQUIPMENT CONSTANT UPDATES
Publication number
20240176336
Publication date
May 30, 2024
Applied Materials, Inc.
Sidharth Bhatia
G05 - CONTROLLING REGULATING
Information
Patent Application
BONDING STRUCTURE OF E CHUCK TO ALUMINUM BASE CONFIGURATION
Publication number
20220063236
Publication date
Mar 3, 2022
Applied Materials, Inc.
Vijay D. PARKHE
B32 - LAYERED PRODUCTS
Information
Patent Application
BONDING STRUCTURE OF E CHUCK TO ALUMINUM BASE CONFIGURATION
Publication number
20200276785
Publication date
Sep 3, 2020
Applied Materials, Inc.
Vijay D. PARKHE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING STRUCTURE OF E CHUCK TO ALUMINUM BASE CONFIGURATION
Publication number
20190099977
Publication date
Apr 4, 2019
Applied Materials, Inc.
Vijay D. PARKHE
B32 - LAYERED PRODUCTS
Information
Patent Application
SYSTEM FOR COUPLING A VOLTAGE TO SPATIALLY SEGMENTED PORTIONS OF TH...
Publication number
20190088522
Publication date
Mar 21, 2019
Applied Materials, Inc.
Roger Alan LINDLEY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM
Publication number
20180366306
Publication date
Dec 20, 2018
Applied Materials, Inc.
Yang YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE ELECTRODE SUBSTRATE SUPPORT ASSEMBLY AND PHASE CONTROL SYSTEM
Publication number
20160372307
Publication date
Dec 22, 2016
Applied Materials, Inc.
YANG YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR AUTOMATED VALIDATION OF SEMICONDUCTOR PROC...
Publication number
20120053719
Publication date
Mar 1, 2012
Applied Materials, Inc.
CHARLES HARDY
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND APPARATUS FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIE...
Publication number
20110115589
Publication date
May 19, 2011
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING CHAMBER WITH ENHANCED GAS DELIVERY
Publication number
20110006038
Publication date
Jan 13, 2011
Michael Charles Kutney
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIE...
Publication number
20090008033
Publication date
Jan 8, 2009
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20080257261
Publication date
Oct 23, 2008
Applied Materials, Inc.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD
Publication number
20080260966
Publication date
Oct 23, 2008
Applied Materials, Inc.
Hiroji Hanawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAGNETIC CONFINEMENT OF A PLASMA
Publication number
20080121345
Publication date
May 29, 2008
Applied Materials, Inc.
Steven C. Shannon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PL...
Publication number
20070113980
Publication date
May 24, 2007
Applied Materials, Inc.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR SHAPING A MAGNETIC FIELD IN A MAGNETIC FIELD-ENHANCED PL...
Publication number
20070108042
Publication date
May 17, 2007
Applied Materials, Inc.
Scott A. Hogenson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma reactor with minimal D.C. coils for cusp, solenoid and mirro...
Publication number
20050167051
Publication date
Aug 4, 2005
APPLIED MATERIALS, INC.
Daniel J. Hoffman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for shaping a magnetic field in a magnetic fie...
Publication number
20040182516
Publication date
Sep 23, 2004
APPLIED MATERIALS, INC.
Roger Alan Lindley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for controlling the magnetic field intensity i...
Publication number
20030085000
Publication date
May 8, 2003
APPLIED MATERIALS, INC.
Keiji Horioka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and apparatus for providing uniform plasma in a magnetic fie...
Publication number
20030006008
Publication date
Jan 9, 2003
APPLIED MATERIALS, INC.
Keiji Horioka
H01 - BASIC ELECTRIC ELEMENTS