Roger B. Fish

Person

Bedford, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Linear actuated 3 way spool valve with constant total flow
- Patent number 12,181,054
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Roger B. Fish
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 11,631,588
- Issue date Apr 18, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cryogenic ferrofluid sealed rotary union
- Patent number 10,704,693
- Issue date Jul 7, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Grant
Method and apparatus for non line-of-sight doping
- Patent number 10,541,137
- Issue date Jan 21, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platen support structure
- Patent number 10,032,601
- Issue date Jul 24, 2018
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and apparatus for holding a substrate over wide temperature...
- Patent number 9,530,682
- Issue date Dec 27, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer platen thermosyphon cooling system
- Patent number 9,514,916
- Issue date Dec 6, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Gregory Citver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas coupled probe for substrate temperature measurement
- Patent number 9,417,138
- Issue date Aug 16, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- G01 - MEASURING TESTING
Information Patent Grant
Technique for limiting transmission of fault current
- Patent number 9,391,450
- Issue date Jul 12, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Takletsadik
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Heated platen with improved temperature uniformity
- Patent number 9,338,829
- Issue date May 10, 2016
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Technique for temperature measurement and calibration of semiconduc...
- Patent number 9,212,949
- Issue date Dec 15, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- G01 - MEASURING TESTING
Information Patent Grant
Vacuum insulated cryogenic fluid transfer hose
- Patent number 9,163,772
- Issue date Oct 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Force sensing system for substrate lifting apparatus
- Patent number 9,108,322
- Issue date Aug 18, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Vacuum insulated fitting enclosure
- Patent number 8,998,269
- Issue date Apr 7, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Technique for limiting transmission of fault current
- Patent number 8,804,288
- Issue date Aug 12, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Technique for limiting transmission of fault current
- Patent number 8,467,158
- Issue date Jun 18, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
In vacuum optical wafer heater for cryogenic processing
- Patent number 8,328,494
- Issue date Dec 11, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Power transfer mechanism for use in transmission and distribution l...
- Patent number 8,320,088
- Issue date Nov 27, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Roger Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for changing temperature of a platen
- Patent number 8,149,256
- Issue date Apr 3, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid delivery mechanism for vacuum wafer processing system
- Patent number 8,020,398
- Issue date Sep 20, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Optical heater for cryogenic ion implanter surface regeneration
- Patent number 7,977,652
- Issue date Jul 12, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer pedestal tilt mechanism and cooling system
- Patent number 6,734,439
- Issue date May 11, 2004
- Allan Weed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Serial wafer handling mechanism
- Patent number 6,429,139
- Issue date Aug 6, 2002
- Eaton Corporation
- Kevin Thomas Ryan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing chamber having separable upper and lower halves
- Patent number 6,347,919
- Issue date Feb 19, 2002
- Eaton Corporation
- Kevin Thomas Ryan
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND APPARATUS FOR COOLING A SUBSTRATE SUPPORT
- Publication number 20240130082
- Publication date Apr 18, 2024
- Robert Irwin DECOTTIGNIES
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Linear Actuated 3 Way Spool Valve With Constant Total Flow
- Publication number 20230028610
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- Roger B. Fish
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20200152466
- Publication date May 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING
- Publication number 20190371608
- Publication date Dec 5, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cryogenic Ferrofluid Sealed Rotary Union
- Publication number 20190301616
- Publication date Oct 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Robert Mitchell
- F17 - STORING OF DISTRIBUTING GASES OR LIQUIDS
Information Patent Application
SYSTEM AND APPARATUS FOR HOLDING A SUBSTRATE OVER WIDE TEMPERATURE...
- Publication number 20150325464
- Publication date Nov 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique For Temperature Measurement And Calibration Of Semiconduc...
- Publication number 20150276487
- Publication date Oct 1, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- G01 - MEASURING TESTING
Information Patent Application
PLATEN SUPPORT STRUCTURE
- Publication number 20150243470
- Publication date Aug 27, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HEATED PLATEN WITH IMPROVED TEMPERATURE UNIFORMITY
- Publication number 20150237677
- Publication date Aug 20, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS COUPLED PROBE FOR SUBSTRATE TEMPERATURE MEASUREMENT
- Publication number 20150071327
- Publication date Mar 12, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Jeffrey E. Krampert
- G01 - MEASURING TESTING
Information Patent Application
Technique For Limiting Transmission Of Fault Current
- Publication number 20140323313
- Publication date Oct 30, 2014
- Kasegn D. Takletsadik
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS
- Publication number 20140324221
- Publication date Oct 30, 2014
- Richard V. Chisholm
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
WAFER PLATEN THERMOSYPHON COOLING SYSTEM
- Publication number 20140262157
- Publication date Sep 18, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Gregory Citver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Vacuum Insulated Cryogenic Fluid Transfer Hose
- Publication number 20140001747
- Publication date Jan 2, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
Vacuum Insulated Fitting Enclosure
- Publication number 20140001746
- Publication date Jan 2, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
TECHNIQUE FOR LIMITING TRANSMISSION OF FAULT CURRENT
- Publication number 20130201588
- Publication date Aug 8, 2013
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Power Transfer Mechanism for Use in Transmission and Distribution L...
- Publication number 20120154959
- Publication date Jun 21, 2012
- Varian Semiconductor Equipment Associates, Inc.
- Roger Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN VACUUM OPTICAL WAFER HEATER FOR CRYOGENIC PROCESSING
- Publication number 20110143461
- Publication date Jun 16, 2011
- Varian Semiconductor equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEATER FOR CRYOGENIC ION IMPLANTER SURFACE REGENERATION
- Publication number 20110073780
- Publication date Mar 31, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Technique for Limiting Transmission of Fault Current
- Publication number 20100296208
- Publication date Nov 25, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Kasegn D. Tekletsadik
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
PLATEN COOLING MECHANISM FOR CRYOGENIC ION IMPLANTING
- Publication number 20100084117
- Publication date Apr 8, 2010
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID DELIVERY MECHANISM FOR VACUUM WAFER PROCESSING SYSTEM
- Publication number 20100084579
- Publication date Apr 8, 2010
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR CHANGING TEMPERATURE OF A PLATEN
- Publication number 20090303306
- Publication date Dec 10, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTILAYER ELECTROSTATIC CHUCK WAFER PLATEN
- Publication number 20090305489
- Publication date Dec 10, 2009
- Roger B. Fish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer pedestal tilt mechanism and cooling system
- Publication number 20030080300
- Publication date May 1, 2003
- Allan Weed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Wafer pedestal tilt mechanism and cooling system
- Publication number 20030070316
- Publication date Apr 17, 2003
- Allan Weed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SERIAL WAFER HANDLING MECHANISM
- Publication number 20020052094
- Publication date May 2, 2002
- KEVIN THOMAS RYAN
- H01 - BASIC ELECTRIC ELEMENTS

Roger B. Fish

Person

Patents Grantslast 30 patents

Linear actuated 3 way spool valve with constant total flow

Method and apparatus for non line-of-sight doping

Cryogenic ferrofluid sealed rotary union

Method and apparatus for non line-of-sight doping

Platen support structure

System and apparatus for holding a substrate over wide temperature...

Wafer platen thermosyphon cooling system

Gas coupled probe for substrate temperature measurement

Technique for limiting transmission of fault current

Heated platen with improved temperature uniformity

Technique for temperature measurement and calibration of semiconduc...

Vacuum insulated cryogenic fluid transfer hose

Force sensing system for substrate lifting apparatus

Vacuum insulated fitting enclosure

Technique for limiting transmission of fault current

Technique for limiting transmission of fault current

In vacuum optical wafer heater for cryogenic processing

Power transfer mechanism for use in transmission and distribution l...

Techniques for changing temperature of a platen

Fluid delivery mechanism for vacuum wafer processing system

Optical heater for cryogenic ion implanter surface regeneration

Wafer pedestal tilt mechanism and cooling system

Serial wafer handling mechanism

Wafer processing chamber having separable upper and lower halves

Patents Applicationslast 30 patents

METHODS AND APPARATUS FOR COOLING A SUBSTRATE SUPPORT

Linear Actuated 3 Way Spool Valve With Constant Total Flow

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

METHOD AND APPARATUS FOR NON LINE-OF-SIGHT DOPING

Cryogenic Ferrofluid Sealed Rotary Union

SYSTEM AND APPARATUS FOR HOLDING A SUBSTRATE OVER WIDE TEMPERATURE...

Technique For Temperature Measurement And Calibration Of Semiconduc...

PLATEN SUPPORT STRUCTURE

HEATED PLATEN WITH IMPROVED TEMPERATURE UNIFORMITY

GAS COUPLED PROBE FOR SUBSTRATE TEMPERATURE MEASUREMENT

Technique For Limiting Transmission Of Fault Current

FORCE SENSING SYSTEM FOR SUBSTRATE LIFTING APPARATUS

WAFER PLATEN THERMOSYPHON COOLING SYSTEM

Vacuum Insulated Cryogenic Fluid Transfer Hose

Vacuum Insulated Fitting Enclosure

TECHNIQUE FOR LIMITING TRANSMISSION OF FAULT CURRENT

Power Transfer Mechanism for Use in Transmission and Distribution L...

IN VACUUM OPTICAL WAFER HEATER FOR CRYOGENIC PROCESSING

OPTICAL HEATER FOR CRYOGENIC ION IMPLANTER SURFACE REGENERATION

Technique for Limiting Transmission of Fault Current

PLATEN COOLING MECHANISM FOR CRYOGENIC ION IMPLANTING

FLUID DELIVERY MECHANISM FOR VACUUM WAFER PROCESSING SYSTEM

TECHNIQUES FOR CHANGING TEMPERATURE OF A PLATEN

MULTILAYER ELECTROSTATIC CHUCK WAFER PLATEN

Wafer pedestal tilt mechanism and cooling system

Wafer pedestal tilt mechanism and cooling system

SERIAL WAFER HANDLING MECHANISM